MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 17

3D MEMS Design via Matlab Interactive Plots

Authors: N.R. Lo and K.S.J. Pister

Affilation: University of California, United States

Pages: 696 - 699

Keywords: 3D MEMS, CAD, matlab, interactive, plots

Matlab is utilized for 3D MEMS design. A preprocessor, written in C, processes the standard, 2D CIF design by applying the topology and spatial information to the design. The Mat3d toolkit then takes the output of the preprocessor and utilizes Matlabôs 3D graphics functions to generate a 3D plot of the 2D CIF design. Using the Mat3d toolkitôs library of commands as well as the existing Matlab commands, the design within the 3D plot then can be viewed from desired magnifications as well as from different perspectives. Objects within the plot could also be available for manipulations such as rotation and translation. During manipulation of the objects in the plot, a Matlab-based collision detection algorithm can be activated for detection of objects coming in contact. A set of raytracing commands is also available with this toolkit, which will ad in simple MOEM design. The preprocessor is currently capable of processing manhattanized CIF with box geometries. The package is available at

3D MEMS Design via Matlab Interactive Plots

ISBN: 0-9666135-7-0
Pages: 741