Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
 
Chapter 17: Software Tools, CAD Systems
 

Modeling and Simulation of 3D Structures for Gigabit DRAM

Authors:O. Kwon, S. Yoon, Y. Ban and T. Won
Affilation:Inha University, KR
Pages:688 - 691
Keywords:modeling, topography, deposition, etching, process simulation, process integration, parallel computation, DRAM
Abstract:In this paper, we present a 3D topography simulator, so-called 3D-SURFILER(SURface proFILER), to model a complicated 3D structure on the substrate for gigabit DRAMs. The 3D-SURFILER comprises a deposition and etching simulator employing a cell advancing scheme and a parallel computational numerical engine. An MIM (Metal-Insulator-Metal) stacked capacitor [1] has been chosen to verify the validity of the simulator.
Modeling and Simulation of 3D Structures for Gigabit DRAMView PDF of paper
ISBN:0-9666135-7-0
Pages:741
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