 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Software Tools, CAD Systems |
Modeling and Simulation of 3D Structures for Gigabit DRAM | |
| Authors: | O. Kwon, S. Yoon, Y. Ban and T. Won |
| Affilation: | Inha University, KR |
| Pages: | 688 - 691 |
| Keywords: | modeling, topography, deposition, etching, process simulation, process integration, parallel computation, DRAM |
| Abstract: | In this paper, we present a 3D topography simulator, so-called 3D-SURFILER(SURface proFILER), to model a complicated 3D structure on the substrate for gigabit DRAMs. The 3D-SURFILER comprises a deposition and etching simulator employing a cell advancing scheme and a parallel computational numerical engine. An MIM (Metal-Insulator-Metal) stacked capacitor [1] has been chosen to verify the validity of the simulator. |
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| ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
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