Authors: D.F. Ostergaard and M. Gyimesi
Affilation: ANSYS, Inc., United States
Pages: 684 - 687
Keywords: Micro Electromechanical Systems (MEMS), finite elements (FE), coupled analysis, reduced order modeling (ROM)
The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program.