 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Software Tools, CAD Systems |
Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS) | |
| Authors: | D.F. Ostergaard and M. Gyimesi |
| Affilation: | ANSYS, Inc., US |
| Pages: | 684 - 687 |
| Keywords: | Micro Electromechanical Systems (MEMS), finite elements (FE), coupled analysis, reduced order modeling (ROM) |
| Abstract: | The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. |
 | View PDF of paper |
| ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
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