MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 17

Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)

Authors: D.F. Ostergaard and M. Gyimesi

Affilation: ANSYS, Inc., United States

Pages: 684 - 687

Keywords: Micro Electromechanical Systems (MEMS), finite elements (FE), coupled analysis, reduced order modeling (ROM)

Abstract:
The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program.

Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)

ISBN: 0-9666135-7-0
Pages: 741