Software Tools, CAD Systems

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 17: Software Tools, CAD Systems
-	Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)
	D.F. Ostergaard and M. Gyimesi
	ANSYS, Inc., U.S.A.
-	Modeling and Simulation of 3D Structures for Gigabit DRAM
	O. Kwon, S. Yoon, Y. Ban and T. Won
	Inha University, Korea
-	A New Analytical Micromotor Design Models for CAD PC-Design Tools
	A. Salman, A. Napieralski and G. Jablolski
	Technical University of Lodz, Poland
-	3D MEMS Design via Matlab Interactive Plots
	N.R. Lo and K.S.J. Pister
	University of California, U.S.A.
-	Wafer Fabrication Process Simulation Including Cost: Which Should be Used in an In-Line Wafer Inspection Strategy, High Sensitivity and High Cost Inspection Machine or Low Sensitivity and Low Cost Inspection Machine?
	K. Nakamae, S. Yamaji and H. Fujioka
	Osaka University, Japan
-	High-Fidelity and Reduced Models of Synthetic Microjets
	A.J. Przekwas, M. Turowski and Z. Chen
	CFD Research Corporation, U.S.A.
-	Quality Based Design and Design for Reliability of Micro Electro Mechanical Systems (MEMS) Using Probabilistic Methods
	S. Reh, P. Lethbridge and D.F. Ostergaard
	ANSYS, Inc., U.S.A.
-	CFD-Micromesh: A Fast Geometrical Modeling and Mesh Generation Tool for 3D Microsystem Simulations
	Z. Tan, M. Furmanczyk, M. Turowski and A.J. Przekwas
	CFD Research Corporation, U.S.A.
-	GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS
	N. Wilson, K. Wang, D. Yergeau and R.W. Dutton
	Stanford University, U.S.A.
-	Numerical Simulation of Micro Assembly Techniques in MEMS Devices
	N. Finch, D. Keating and Y. He
	IntelliSense Corporation, U.S.A.
-	Modified Nodal Analysis for MEMS with Multi-Energy Domains
	J.V. Clark, N. Zhou and K.S.J. Pister
	University of California at Berkeley, U.S.A.
-	A Computational Framework for Modeling One-Dimensional, Sub-Grid Components and Phenomena in Multi-Dimensional Micro-Systems
	M.Z. Pindera, S. Bayyuk, V. Upadhya and A.J. Przekwas
	CFD Research Corporation, U.S.A.
-	Analysis of Realistic Large MEMS Devices
	P. Ljung, M. Bächtold and M. Spasojevic
	Coyote Systems, Inc., U.S.A.
ISBN:	0-9666135-7-0
Pages:	741
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