Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 16: Applications: Electromagnetics, Optics, Imaging

Optical Propagation Methodologies for Optical MEM Systems

Authors:T.P. Kurzweg, S.P. Levitan, J.A. Martinez, P.J. Marchand, M.T. Shomsky and D.M. Chiarulli
Affilation:University of Pittsburgh, US
Pages:656 - 659
Keywords:MEMS-CAD, optical MEMS, MOEMS, micro-optics
Abstract:In this paper, we examine optical propagation techniques for modeling and simulating optical MEM systems. We determine an appropriate technique through studying two criteria: the requirements established by the physical properties of these systems and the goal of having an interactive CAD tool. After examining several classical methods, we conclude with the choice of an optical propagation method and the implementation of this method in our free-space opto-electro-mechanical CAD tool, Chatoyant.
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