Authors: J.L. Kuhn, S.B. Dutta, M.A. Greenhouse and D.B. Mott
Affilation: NASA/Goddard Space Flight Center, United States
Pages: 676 - 679
Keywords: micro-mirrors, simulation, cryogenic, electrostatic, thermal
Closed form and finite element models are developed to predict the device response of aluminum electrostatic torsion micro-mirrors fabricated on silicon substrate for space applications at operating temperatures of 30K. Initially, closed form expressions for electrostatic pressure and mechanical restoring torque are used to predict the pull-in and release voltages at room temperature. Subsequently, a detailed mechanical finite element model is developed to predict stresses and vertical beam de ection induced by the electrostatic and thermal loads. An incremental and iterative solution method is used in conjunction with the non-linear finite element model and closed form electrostatic equations to solve the coupled electro-thermo-mechanical problem. The simulation results are compared with experimental measurements at room temperature of fabricated micro-mirror devices.