Authors: D. Briand, M.-A. Grétillat, B. van der Schoot and N.F. de Rooij
Affilation: Institute of Microtechnology, Switzerland
Pages: 640 - 643
Keywords: micro-hotplates, FEM simulation, MEMCAD, thermal, gas sensors
In this paper we report on the electrothermal simulations performed in the aim of optimising the power consumption and the temperature distribution of micro-hotplates for gas sensing applications. The micro-hotplate designs were optimised using the software MEMCAD from Microcosm Technologies. From the results obtained, we propose a micro-hotplate design with a silicon island underneath the membrane. The silicon island ensures an uniform temperature over the sensing area for the metal-oxide gas sensors. Moreover, it allows to thermally isolating electronic components and was used to lower the power consumption of MOSFET gas sensors. The optimised micro-hotplates are suitable for applications in the automotive industry and in electronic nose instruments.