 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 15: Applications: Micropumps, Heaters and Coolers |
Thermal Management of Micro-Hotplates using MEMCAD as Simulation Tool | |
| Authors: | D. Briand, M.-A. Grétillat, B. van der Schoot and N.F. de Rooij |
| Affilation: | Institute of Microtechnology, CH |
| Pages: | 640 - 643 |
| Keywords: | micro-hotplates, FEM simulation, MEMCAD, thermal, gas sensors |
| Abstract: | In this paper we report on the electrothermal simulations performed in the aim of optimising the power consumption and the temperature distribution of micro-hotplates for gas sensing applications. The micro-hotplate designs were optimised using the software MEMCAD from Microcosm Technologies. From the results obtained, we propose a micro-hotplate design with a silicon island underneath the membrane. The silicon island ensures an uniform temperature over the sensing area for the metal-oxide gas sensors. Moreover, it allows to thermally isolating electronic components and was used to lower the power consumption of MOSFET gas sensors. The optimised micro-hotplates are suitable for applications in the automotive industry and in electronic nose instruments. |
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| ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
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