Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
 
Chapter 14: Applications: MEMS, Sensors
 

Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer

Authors:G. Li, Z. Li, C. Wang, Y. Hao, T. Li and G. Wu
Affilation:Peking University, CN
Pages:628 - 631
Keywords:triaxial accelerometer, piezoelectric, quad-beam, zero cross-axis sensitivity
Abstract:A monolithic piezoelectric triaxial accelerometer, using a highly symmetric quad-beam structure with a single seismic mass, has been developed. The structure of the accelerometer is analyzed in detail theoretically and numerically. Static and modal simulations with FEM (Finite Element Method) simulator are done to analyze mechanical response at different applied accelerations. The simulated results show that the accelerometer can sense triaxial acceleration separately simultaneously. It has sensitivities about 21mV/g, 15mV/g and 15mV/g in Z-, X- and Y-axis, respectively. Moreover, nearly zero cross-axis sensitivity can be obtained theoretically. Some design optimizations are done to improve its performance.
Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial AccelerometerView PDF of paper
ISBN:0-9666135-7-0
Pages:741
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