Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 14: Applications: MEMS, Sensors

Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment

Authors:Y. Dong, F.E.H. Tay, Y. Wen, X. Yuan and W.T. Chen
Affilation:National University of Singapore, SG
Pages:621 - 623
Keywords:optimization, gyroscope, eigenfrequency, testing
Abstract:The eigenfrequency of a MEMS Tuning Fork Gyroscope (TFG) is calculated using a formula derived from Rayleigh method. From this formula, the objective function for the optimal design is established. Then two methods to solve the objective function are introduced. The TFG has also been fabricated using SOI technologies based on the optimum design. Driving testing results show good agreement between the calculated and the experimental eigenfrequencies.
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