MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 14

Analysis of Anodic Bonding and Packaging Effects in Micro Sensors

Authors: T-K. Shing

Affilation: Industrial Technology Research Institute, Taiwan

Pages: 613 - 616

Keywords: anodic bonding, sensor, packaging

Anodic bonding is quite popular in making micro-sensors since it can bond sodium-rich glass to silicon or virtually any metals with good adhesion strength in lower temperature. It is well known that this process will introduce thermal strain due to different coefficients of thermal expansion between silicon (or other metal) and glass. Yet its effects have not been well studied. After anodic bonding, either adhesive or solder joint is usually used to attach the bonded sensors to plastics or other materials. The packaging strategy will definitely influence the performance of sensors too. The effects and interactions in the process of anodic bonding and die attachment will be studied in this paper. Models based on finite element method are proposed to describe the relationship among them. The simulation results match experimental results quite well. Based on this model, the major influential factors are also studied systematically.

Analysis of Anodic Bonding and Packaging Effects in Micro Sensors

ISBN: 0-9666135-7-0
Pages: 741