Applications: MEMS, Sensors

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 14: Applications: MEMS, Sensors
-	Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact
	E.K. Chan and R.W. Dutton
	Stanford University, U.S.A.
-	Modeling and Control of Nanomirrors for EUV Maskless Lithography
	Y. Chen, Y. Shroff and W.G. Oldham
	University of California, U.S.A.
-	Simulation for Low Temperature Coefficient Design of Piezoresistive and Hall Sensors
	K. Matsuda and Y. Kanda
	Naruto University of Education, Japan
-	The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices
	N. Mankame and G.K. Ananthasuresh
	University of Pennsylvania, U.S.A.
-	Analysis of Anodic Bonding and Packaging Effects in Micro Sensors
	T-K. Shing
	Industrial Technology Research Institute, Taiwan
-	Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications
	A. Gupta, R. Bashir, G.W. Neudeck and M. McElfresh
	Purdue University, U.S.A.
-	Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment
	Y. Dong, F.E.H. Tay, Y. Wen, X. Yuan and W.T. Chen
	National University of Singapore, Singapore
-	On Design of a Backplate Used in a Hearing Aid
	N.L. Pedersen
	Technical University of Denmark, Denmark
-	Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer
	G. Li, Z. Li, C. Wang, Y. Hao, T. Li and G. Wu
	Peking University, China
ISBN:	0-9666135-7-0
Pages:	741
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