Authors: M.U. Kim, K.W. Kim, J.H. Kim and B.M. Kwak
Affilation: KAIST, Korea
Pages: 583 - 585
Keywords: microelectromechanical system(MEMS), linearized Navier-Stokes equation, matched asymptotic expansion(MAE), edge effect, viscous damping
Hydrodynamic force on a plate moving in a viscous fluid near the plane wall as a model of a microelectromechanical system(MEMS) is considered. The flow field is described by the linearized Navier-Stokes equation. The method of matched asymptotic expansions(MAE) is used, in which the physical domain is subdivided into three regions, interior, edge and outer region respectively. The solution of the Reynolds equation is compensated by so called edge effect. The damping coefficients compared with the experimental results show good consistency.