Authors: M. Varghese, V.L. Rabinovich and S.D. Senturia
Affilation: Massachusetts Institute of Technology, United States
Pages: 493 - 496
Keywords: macromodels, energy methods, MEMS, stress-stiffening, modal-methods
We present a process for generating reduced-order models for stress-stiffened MEMS structures. The models are created using the established CHURN process, which uses non-linear, analytic, energy functions to describe the state of each conservative quasi-static energy domain (electrostatic, magnetostatic, elastostatic) in the MEMS structure. Equations of motion for the structure are constructed from the energy functions using Lagrangian mechanics. Our new contribution is the generation of an accurate analytic function that captures the non-linear elastic potential energy (strain energy) of the structure.