Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
 
Chapter 11: Numerics, Algorithms
 

Reduced-Order Models of Stress-Stiffened MEMS Structures

Authors:M. Varghese, V.L. Rabinovich and S.D. Senturia
Affilation:Massachusetts Institute of Technology, US
Pages:493 - 496
Keywords:macromodels, energy methods, MEMS, stress-stiffening, modal-methods
Abstract:We present a process for generating reduced-order models for stress-stiffened MEMS structures. The models are created using the established CHURN process, which uses non-linear, analytic, energy functions to describe the state of each conservative quasi-static energy domain (electrostatic, magnetostatic, elastostatic) in the MEMS structure. Equations of motion for the structure are constructed from the energy functions using Lagrangian mechanics. Our new contribution is the generation of an accurate analytic function that captures the non-linear elastic potential energy (strain energy) of the structure.
Reduced-Order Models of Stress-Stiffened MEMS StructuresView PDF of paper
ISBN:0-9666135-7-0
Pages:741
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