Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 11: Numerics, Algorithms

Mathematical Analysis of Electrostatically Actuated MEMS Devices

Authors:D. Bernstein, P. Guidotti and J.A. Pelesko
Affilation:California Institute of Technology, US
Pages:489 - 492
Keywords:actuator, MEMS, asymptotics, modeling, continuation
Abstract:We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatiacallyh actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space of the displacement, implying the existence f a critical voltage beyond which there are no solutions of the equations. This critical voltage corresponds to the pull-in voltage observed in simpler lumped models, the numerical solution of three dimensional models, and also in experimental devices. We show how pseudo-arclength continuation may be used to efficiently compuet the solutions on both sides of the fold.
Mathematical Analysis of Electrostatically Actuated MEMS DevicesView PDF of paper
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