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 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 11: Numerics, Algorithms |
| | Mathematical Analysis of Electrostatically Actuated MEMS Devices | | Authors: | D. Bernstein, P. Guidotti and J.A. Pelesko | | Affilation: | California Institute of Technology, U.S.A. | | Pages: | 489 - 492 | | Keywords: | actuator, MEMS, asymptotics, modeling, continuation | | Abstract: | We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatiacallyh actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space of the displacement, implying the existence f a critical voltage beyond which there are no solutions of the equations. This critical voltage corresponds to the pull-in voltage observed in simpler lumped models, the numerical solution of three dimensional models, and also in experimental devices. We show how pseudo-arclength continuation may be used to efficiently compuet the solutions on both sides of the fold. |  | View paper | | ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
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