Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
 
Chapter 11: Numerics, Algorithms
 

A Novel Approach for Determining Pull-In Voltages in Micro-electro-mechanical Systems (MEMS)

Authors:D.S. Long, M.A. Shannon and N.R. Aluru
Affilation:University of Illinois at Urbana-Champaign, US
Pages:481 - 484
Keywords:MEMS, Lagrange multiplier method, pull-in voltage, two-dimensional electrostatic analysis
Abstract:In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The sign of the lagrange multiplier will be the criterion used to identify when the conductors come into contact. The validity of this numerical approach is demonstrated by two simple examples along with comparison to previously published data.
A Novel Approach for Determining Pull-In Voltages in Micro-electro-mechanical Systems (MEMS)View PDF of paper
ISBN:0-9666135-7-0
Pages:741
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