Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
 
Chapter 11: Numerics, Algorithms
 

A Novel Approach to Simulate the Potential at the Center Axis of Poisson's Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes

Authors:D.T.K. Kwok, Z.M. Zeng and P.K. Chu
Affilation:City University of Hong Kong, CN
Pages:505 - 508
Keywords:Poisson's equation, center axis, numerical iteration, cylindrical co-ordinate, non-symmetry field
Abstract:A novel and practical method is developed to resolve the three dimensional Poisson’s and Laplace’s equation at the center axis in cylindrical coordinates. The method employs the rectangular xyz co-ordinates to solve the potential f along the center axis. The new approach is tested by comparing the potential distribution of a biased cylindrical duct simulated by two dimensional l'Hospital rule. The capability of the method to model non-symmetry field structure is verified by simulating the potential distribution inside the cylindrical duct with only a three quarter of the wall biased with a positive voltage.
A Novel Approach to Simulate the Potential at the Center Axis of Poisson's Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation ProcessesView PDF of paper
ISBN:0-9666135-7-0
Pages:741
Up
© 2014 Nano Science and Technology Institute. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Site Map