 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 11: Numerics, Algorithms |
| | A Novel Approach to Simulate the Potential at the Center Axis of Poisson's Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes |
| Authors: | D.T.K. Kwok, Z.M. Zeng and P.K. Chu |
| Affilation: | City University of Hong Kong, China |
| Pages: | 505 - 508 |
| Keywords: | Poisson's equation, center axis, numerical iteration, cylindrical co-ordinate, non-symmetry field |
| Abstract: | A novel and practical method is developed to resolve the three dimensional Poisson’s and Laplace’s equation at the center axis in cylindrical coordinates. The method employs the rectangular xyz co-ordinates to solve the potential f along the center axis. The new approach is tested by comparing the potential distribution of a biased cylindrical duct simulated by two dimensional l'Hospital rule. The capability of the method to model non-symmetry field structure is verified by simulating the potential distribution inside the cylindrical duct with only a three quarter of the wall biased with a positive voltage. |
 | View paper |
| ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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