A Novel Approach to Simulate the Potential at the Center Axis of Poisson's Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 11: Numerics, Algorithms
	A Novel Approach to Simulate the Potential at the Center Axis of Poisson's Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes
Authors:	D.T.K. Kwok, Z.M. Zeng and P.K. Chu
Affilation:	City University of Hong Kong, CN
Pages:	505 - 508
Keywords:	Poisson's equation, center axis, numerical iteration, cylindrical co-ordinate, non-symmetry field
Abstract:	A novel and practical method is developed to resolve the three dimensional Poisson’s and Laplace’s equation at the center axis in cylindrical coordinates. The method employs the rectangular xyz co-ordinates to solve the potential f along the center axis. The new approach is tested by comparing the potential distribution of a biased cylindrical duct simulated by two dimensional l'Hospital rule. The capability of the method to model non-symmetry field structure is verified by simulating the potential distribution inside the cylindrical duct with only a three quarter of the wall biased with a positive voltage.
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ISBN:	0-9666135-7-0
Pages:	741
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