Authors: V.I. Zhulin, S.J. Owen and D.F. Ostergaard
Affilation: ANSYS, Inc., United States
Pages: 501 - 504
Keywords: finite element, electrostatic-structural, coupled analysis, automatic mesh morphing
A co-simulation tool based on finite element principles has been developed to solve coupled electrostatic-structural problems. An automated mesh morphing algorithm has been employed to update the field mesh after structural deformation. The co-simulation tool has been successfully applied to the hysteric behavior of a MEMS switch.