Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
 
Chapter 11: Numerics, Algorithms
 

Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh Morphing

Authors:V.I. Zhulin, S.J. Owen and D.F. Ostergaard
Affilation:ANSYS, Inc., US
Pages:501 - 504
Keywords:finite element, electrostatic-structural, coupled analysis, automatic mesh morphing
Abstract:A co-simulation tool based on finite element principles has been developed to solve coupled electrostatic-structural problems. An automated mesh morphing algorithm has been employed to update the field mesh after structural deformation. The co-simulation tool has been successfully applied to the hysteric behavior of a MEMS switch.
Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh MorphingView PDF of paper
ISBN:0-9666135-7-0
Pages:741
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