Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh Morphing

	MSM 2000 Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems Chapter 11: Numerics, Algorithms
	Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh Morphing
Authors:	V.I. Zhulin, S.J. Owen and D.F. Ostergaard
Affilation:	ANSYS, Inc., US
Pages:	501 - 504
Keywords:	finite element, electrostatic-structural, coupled analysis, automatic mesh morphing
Abstract:	A co-simulation tool based on finite element principles has been developed to solve coupled electrostatic-structural problems. An automated mesh morphing algorithm has been employed to update the field mesh after structural deformation. The co-simulation tool has been successfully applied to the hysteric behavior of a MEMS switch.
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ISBN:	0-9666135-7-0
Pages:	741
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