Authors: G.K. Fedder
Affilation: Carnegie Mellon University, United States
Pages: 7 - 10
Keywords: MEMS CAD, MEMS design methodology
A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS hierarchical circuit representation and mapping of process, materials properties, design rules, and parasitic parameters into appropriate technology files.