 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 1: Plenary lectures |
Top Down Design of MEMS | |
| Authors: | G.K. Fedder |
| Affilation: | Carnegie Mellon University, US |
| Pages: | 7 - 10 |
| Keywords: | MEMS CAD, MEMS design methodology |
| Abstract: | A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS hierarchical circuit representation and mapping of process, materials properties, design rules, and parasitic parameters into appropriate technology files. |
 | View PDF of paper |
| ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
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