| |
 | MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 1: Plenary lectures |
| | Top Down Design of MEMS | | Authors: | G.K. Fedder | | Affilation: | Carnegie Mellon University, U.S.A. | | Pages: | 7 - 10 | | Keywords: | MEMS CAD, MEMS design methodology | | Abstract: | A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS hierarchical circuit representation and mapping of process, materials properties, design rules, and parasitic parameters into appropriate technology files. |  | View paper | | ISBN: | 0-9666135-7-0 |
| Pages: | 741 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
|
| Upcoming Events |
 |
 |
 |
 |
| nanoPRwire™ |
 |
| News Headlines |
 |
|
|
| |
| |
|
| | |
| |
|
|
