Nano Science and Technology Institute
MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Chapter 1: Plenary lectures

Top Down Design of MEMS

Authors:G.K. Fedder
Affilation:Carnegie Mellon University, US
Pages:7 - 10
Keywords:MEMS CAD, MEMS design methodology
Abstract:A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS hierarchical circuit representation and mapping of process, materials properties, design rules, and parasitic parameters into appropriate technology files.
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