Authors: R.E. Rudd
Affilation: Lawrence Livermore National Laboratory, United States
Pages: 173 - 176
Keywords: concurrent multiscale modeling, MEMS, flexural resonator
We review concurrent multiscale simulations of dynamic and temperature-dependent processes found in nanomechanical systems coupled to larger scale surroundings. We focus on the behavior of sub-micron Micro-Electro-Mechanical Systems (MEMS), especially microresonators. These systems are often called NEMS, for Nano-Electro-Mechanical Systems. The coupling of length scales methodology we have developed for MEMS employs an atomistic description of small but key regions of the system, consisting of millions of atoms, coupled concurrently to a finite element model of the periphery. The model, Coarse-Grained Molecular Dynamics (CGMD), builds a generalized finite element formalism from the underlying atomistic physics in order to ensure a smooth coupling between regions governed by different length scales. The result is a model that accurately describes the behavior of the mechanical components of MEMS down to the atomic scale.