 | Nanotech 2002 Vol. 2
Technical Proceedings of the 2002 International Conference on Computational Nanoscience and Nanotechnology
Chapter 14: Process Modeling |
| - | Numerical Investigations of Laser Induced Crystallization and Stress Development in Phase Change Electroceramic Materials |
| | N. Pirch, O. Baldus, R. Waser and E.W. Kreutz |
| | RWTH Aachen, Germany |
| - | The Level-Set Method for Modeling Epitaxial Growth |
| | C. Ratsch, M. Petersen and R.E. Caflisch |
| | University of California-Los Angeles, USA |
| - | Numerical Simulation of Superconformal Electrodeposition Using the Level Set Method |
| | D. Wheeler, D. Josell and T.P. Moffat |
| | NIST, USA |
| - | A Physically-Based Model for Oxidation in a Circular Trench in Silicon |
| | Y. Xu, C. Sudhama, S. Hong, J.A. Sellers, S. Ambadi, K. Kamekona, G. Averett, B. Ruiz, I. Wan, W. Cai, Y. Wu, J.C. Costa and R.B. Davies |
| | ON Semiconductor, USA |
| - | Kinetic Monte Carolo Simulation of Thin Film Growth with Void Formation - Application to via Filling |
| | Y. Hiwatari, Y. Kaneko, K. Ohara and T. Murakami |
| | Kanazawa University, Japan |
| - | Gas Flow Simulation in a PECVD Reactor |
| | A.N.R. da Silva and N.I. Morimoto |
| | LSI – EPUSP, Brazil |
| - | Rule Based Validation of Processing Sequences |
| | U. Hansen, C. Germer, S. Büttgenbach and H-J Franke |
| | TU Braunschweig, Germany |
| - | Process and Device Calibration for 31/51nm NMOS/PMOS Devices fabricated by Direct Write E-Beam |
| | H. Puchner, N. Eib, J. Kimball, M. Mirabedini, J. Haywood and S. Aronowitz |
| | Cypress Semiconductor, USA |
| - | The Numerical Simulation of a Substractive Process for the Fabrication of 3-D Low Temperature Co-Fired Ceramics Packaging Structures and Devices: Jet Vapor Etching |
| | I. Ramos, L. García, E.W. Simoes, R. Furlan, J.J. Santiago-Aviles and M.T. Pereira |
| | University of Puerto Rico at Humacao, USA |
| - | Characterization of Ion Implantation in Si Using Infrared Spectroscopy with a Lock-In common-Mode-Rejection Demodulation |
| | F. Rábag, A. Mandelis and A. Salnik |
| | University of Toronto, Canada |
| ISBN: | 0-9708275-6-3 |
| Pages: | 504 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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