Nanocrystalline Silicon Superlattices for Nanoelectronic Devices

	Nanotech 2002 Vol. 2 Technical Proceedings of the 2002 International Conference on Computational Nanoscience and Nanotechnology Chapter 12: Molecular and Nanoelectronics
	Nanocrystalline Silicon Superlattices for Nanoelectronic Devices
Authors:	L. Tsybeskov
Affilation:	University of Rochester, US
Pages:	304 - 307
Keywords:	nanocrystalline silicon superlattices, nanoelectronic devices
Abstract:	This paper provides a brief introduction to a novel nanostructured system consisting of ordered layers of Si nanocrystals separated by atomically flat and chemically abrupt layers of amorphous silicon dioxide with thickness of several nanometers. The unique structural, optical and electrical properties permitting unusual device application are discussed.
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ISBN:	0-9708275-6-3
Pages:	504
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