Nanotech 2002 Vol. 2
Nanotech 2002 Vol. 2
Technical Proceedings of the 2002 International Conference on Computational Nanoscience and Nanotechnology

Molecular and Nanoelectronics Chapter 12

Nanocrystalline Silicon Superlattices for Nanoelectronic Devices

Authors: L. Tsybeskov

Affilation: University of Rochester, United States

Pages: 304 - 307

Keywords: nanocrystalline silicon superlattices, nanoelectronic devices

Abstract:
This paper provides a brief introduction to a novel nanostructured system consisting of ordered layers of Si nanocrystals separated by atomically flat and chemically abrupt layers of amorphous silicon dioxide with thickness of several nanometers. The unique structural, optical and electrical properties permitting unusual device application are discussed.

Nanocrystalline Silicon Superlattices for Nanoelectronic Devices

ISBN: 0-9708275-6-3
Pages: 504