Nano Science and Technology Institute
Nanotech 2002 Vol. 2
Nanotech 2002 Vol. 2
Technical Proceedings of the 2002 International Conference on Computational Nanoscience and Nanotechnology

Chapter 10:

Nanoscale Modeling of Front-End Processing in Silicon

-Spatially Resolved Electron Energy-Loss Spectroscopy, a Tool to Verify Electronic Structure Calculations in Nanostructured Materials
 G. Duscher, J. Plitzko, C. Kisielowski, R. Buzko, S.J. Pennycook and S.T. Pantelides
 North Carolina State University, US
-Nanoworld Semiconductor Industry - State and Future Challenges of Technology Computer Aided Design
 H. Puchner
 Cypress Semiconductor, US
-Introducing Monte Carlo Diffusion Simulation into TCAD tools
 N. Strecker, V. Moroz and M. Jaraiz
 Avant!, US
-Diffusion Mechanisms and Capture Radii in Silicon
 K. Beardmore, W. Windl, B.P. Haley and N. Gronbech-Jensen
 Motorola, US
-Structural and Electronic Properties of Quantum Dot Surfaces
 G. Galli, A Puzder, A.J. Willilamson, J.C. Grossman and L. Pizzagalli
 Lawrence Livermore National Laboratory, US
ISBN:0-9708275-6-3
Pages:504
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