Nano Science and Technology Institute
Nanotech 2002 Vol. 2
Nanotech 2002 Vol. 2
Technical Proceedings of the 2002 International Conference on Computational Nanoscience and Nanotechnology
Chapter 1: Plenary Lectures

Modeling and Simulation for MEMS Design, Industrial Requirements

Authors:R. Neul
Affilation:Robert Bosch GmbH, DE
Pages:16 - 19
Keywords:MEMS, development process, design methods, modeling, simulation, design flow
Abstract:The development process of today’s products is dominated by demands like ‘product performance’, ‘quality, ‘time to market’, ‘development cost’, ‘development risk’ etc., while the products’ complexity is increasing. Design methods for MEMS devices are discussed, which particularly use modeling and simulation techniques. The objectives of these methods are to optimize the function of the devices and to minimize development time and cost by avoiding unnecessary design cycles and foundry runs. Bosch is using MEMS mostly in the field of automotive sensors, which already experiences a notable growth rate. It is estimated that this growth will go on in the future [2,14]. Therefore efficiency of the development process is quite an important issue.
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