Nano Science and Technology Institute

Asian Foundry Will Evaluate Lithography Products From U.S. Company

The Chinese foundry Semiconductor Manufacturing International Corporation plans to assess Inverse Lithography Technology (ILT) products from Luminescent Technologies, Inc., a private company headquartered in California. The SMIC in China looks at lithography as a challenge and looks to push for more innovations from this technology. According to Luminescent’s website, ILT products made by Luminescent evaluate the desired on-wafer pattern and then mathematically determine the mask features needed to produce the intended silicon outcome. ILT enables pattern fidelity, expanded lithography process windows and reduced mask preparation cycle time.

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