Asian Foundry Will Evaluate Lithography Products From U.S. Company
The Chinese foundry Semiconductor Manufacturing International Corporation plans to assess Inverse Lithography Technology (ILT) products from Luminescent Technologies, Inc., a private company headquartered in California. The SMIC in China looks at lithography as a challenge and looks to push for more innovations from this technology. According to Luminescent’s website, ILT products made by Luminescent evaluate the desired on-wafer pattern and then mathematically determine the mask features needed to produce the intended silicon outcome. ILT enables pattern fidelity, expanded lithography process windows and reduced mask preparation cycle time.
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