Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)
This paper reports on the results of an improved surface modification method called Molecular Vapor Deposition (MVD)1. MVD allows for the creation of molecular organic coatings which are denser and more durable than those obtained by current liquid or vaporphase methods. This improvement has been achieved using a âsequentialâ or âlayeredâ vapor deposition scheme of two different molecular films. The first molecular coating is a âseedâ or adhesion promoter layer which is used to increase the binding sites for the subsequent functional molecular layer. The resulting surface coatings were observed to have improved stability to immersion applications, higher temperature stability and overall improved durability as a result of the increased surface coverage when compared to standard self-assembled monolayers (SAMs). These new film capabilities will have significant importance in improving the functionality and reliability of many micro- and nano-scale devices. The sequential approach with the seed layer has also been used to deposit molecular coatings on a variety of substrate materials (such as polymers, plastics and metals) which normally do not allow high quality surface coatings.