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Nanofabrication Technologies, Devices & Applications Committee

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Committee Chairs

  • Warren Y. Lai, Lucent Technologies/Bell Laboratories and New Jersey Nanotechnology Consortium
  • Leonidas E. Ocola, Argonne National Laboratory
  • Stanley Pau, Lucent Technologies/Bell Laboratories and New Jersey Nanotechnology Consortium

Committee Members

  • Adekunle Adeyeye, National University of Singapore (Singapore)
  • Robert H. Austin, Princeton University
  • Ronald S. Besser, Stevens Institute of Technology
  • Gregory R. Bogart, Sandia National Labs
  • Dustin W. Carr, Sandia National Labs
  • Chorng-Ping Chang, Applied Materials, Inc.
  • Charles Kin P. Cheung, Rutgers University
  • Zhixiong Guo, Rutgers University
  • Takamaro Kikkawa, Hiroshima University (Japan) and National Institute of Advanced Industrial Science and Technology (Japan)
  • Dirk G. Kurth, Max-Planck-Institut fur Kolloid und Grenzflachenf (Germany)
  • Nicolaas F. de Rooij, Univ. de Neuchatel (Switzerland)
  • Vivian Ng, National University of Singapore (Singapore)
  • Andres H. La Rosa, Portland State University
  • Sergey D. Lopatin, KLA-Tencor Corp.
  • Omkaram Nalamasu, Rensselaer Polytechnic Institute
  • John A. Rogers, University of Illinois at Urbana-Champaign
  • Gary Wiederrecht, Argonne National Laboratory

Annual Symposium Synopsys

Nanotechnology promises an unprecedented era of innovation across multiple disciplines and diverse applications. Its pursuits and activities are proliferating with different approaches, from top-down to bottom-up to converging techniques, and with varying degree of maturity from concept to commercialization. The key to realize nanotechnology's potential is still the ability to assemble and manufacture nano-scale devices, structures with dimensions smaller than 100nm. This conference will focus on all areas of nanofabrication that will accelerate nanotechnology's progress: innovative research to state-of-the-art development to cost-effective manufacturability in nanofabrication processes and technologies for current and novel devices and applications, including enabling and differentiating aspects in materials, metrology, characterization, and reliability.

Topics & Application Areas

Nanofabrication techniques involving growth, patterning and assembly can cover:

  • lithography by e-beam, laser milling, STM, ion beam, imprint, emboss, EUV, or process enhancement
  • etching pushing the nano-limits for novel material and structure with unconventional shape and profile or high-aspect ratio
  • material growth and deposition by MBE, MOCVD, ALD, layer-by-layer, spin-on, 3D nanostructure engineering, selective growth, or colloidal-assembly
  • non-conventional patterning approaches, including self-assembly, direct laser writing, interference lithography, two-photon absorption, and combination of top-down and bottom-up techniques
  • new materials, nano-particles, organic and biofunctional structures, novel processes, and challenges
  • electrochemical synthesis, dynamics at solid-liquid interfaces, and superhydrophobic surfaces
  • design, simulation, systems, and architectures that enhance nanofabrication
  • metrology and characterization, electrochemical and time resolved metrology, AFM, and nano-analysis for homo- and hetero-interfaces
  • standards, reliability, cost-effectiveness and industrial implementation of nanofabrication technologies.

Nano-devices can encompass optical, electrical, chemical, fluidic, acoustic, magnetic, piezoelectric, and other technologies. Emphasis will be on development of novel design and fabrication for nanotechnology applications:

  • optical, electrical and Terahertz sensor devices and network
  • laser: novel types, materials, and application
  • waveguide: fiber and integrated
  • MOEMS, MEMS, and NEMS for nano-applications
  • resonators and switches
  • nano-structure, carbon nanotube, nano-wire, nano-bridges, nano-dots
  • molecular and nano-electronics, organic and chalcogenide devices
  • genomics and proteomics, and nano-scaffold for bio-applications
  • micro- and nano-fluidic devices, liquid devices for electronics and photonics, catalytic activity, chemical reactor, lab-on-a-chip application, fuel cells, and crystal growth chamber
  • mechanical, acoustic, magnetic, and piezoelectric devices
  • devices based on plasmonics and surface enhanced phenomena in Raman scattering, nonlinear spectroscopy, infrared absorption, and photochemistry
  • hybrid, multifunctional, and other technologies.

Submit Proposal or Comment to Committee Chair

We encourage you to participate and to submit your interest as either an Scientific Committee Member or to organize a Scientific Committee*. The NSTI will provide the infrastructure for each Industrial Committee to organize and present a focused Symposium at the annual Nanotech Conference and Trade Show (Nanotech 2008, Boston, Massachusetts, June 1-5, 2008). Details will be provide upon approval of proposal.

* All submissions will be reviewed by the NSTI Scientific Committee Chairs and a timely response will be issued.

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