Index of Keywords

PZT

A Novel Structure for PZT-Based Piezoelectric Microphone

Fabrication of High Quality PZT Thick Film Using Lift-Off Technique

Characterization of Nanocrystalline PZT Synthesized via a Hydrothermal Method

Preparation of PZT nanodots on Nano-Templated Substrates

Biologically Functionalized Nanochannels on Ferroelectric Lead Zirconium Titanate Surfaces

Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering

High Fidelit Loud Microspeaker Based on PZT Bimorph Diaphragm

Preparation of functional PZT films on 6” and 8” silicon wafers by high rate sputtering

High Performance Sputtered PZT Film for MEMS applications

Optimised Piezoelectric PZT Thin Film Production on 8” Silicon Wafers for Micromechanical Applications

PZT cantilever beam

Development of CAD Model for MEMS Micropumps

PZT membrane

Design, Fabrication and Experimental-Numerical Study of PZT Sensors

Analysis of Micromachined PZT Membranes for MEMS Power

PZT thin film

Design, Simulation and Fabrication of a Bridge Structure Microtransducer

PZT thin film bridge

Design, Simulation and Fabrication of a Bridge Structure Microtransducer

PZT-micro cantilever

A Piezoelectric Micro-Cantilever Bio-Sensor Using the Mass-Micro-Balancing Technique with Self-Excitation