Index of Keywords

process simulation

Challenges in Process Modeling for MEMS

A Novel Method to Utilize Existing TCAD Tools to Build Accurate Geometry Required for MEMS Simulation

SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing

Numerical Simulations of Sputter Deposition and Etching in Trenches Using the Level Set Technique

Systematic Global Calibration of a Process Simulator

Modeling and Simulation of 3D Structures for Gigabit DRAM

Towards Predictive TCAD and Fab Integration

Modeling of Deposition Process by Level Set Method

A 2D Visualization Tool for SUMMiT V Designs

Rule Based Validation of Processing Sequences

Rule Based Validation of Processing Sequences

Practical Atomistic Dopant Diffusion Simulation of Shallow Junction Fabrication Processes and Intrinsic Fluctuations for sub-100nm MOSFETs

Merging Atomistic and Continuum Simulations of Silicon Technology - The Best from the Two Worlds

Computed Metallofullerene Yields in the X@C74 and Z@C82 Series

process simulator

DOPDEES/PMM: A System for Portable Model Description

process synthesis

A Method of MOSFET Dopant Profile Prediction and its Use in Transistor Design

process tools

Computer-Based Process Design Support for MEMS

process validation. internet-based design tools

Layout Verification Tools for MEMS Physical Design

process variability

Process Aware Compact Model Parameter Extraction for 45 nm Process

Si-Based Process Aware SPICE Models for Statistical Circuit Analysis