Index of Keywords


Numerical Capacitance Calculation for Mems Pressure Sensor by Method of Moments

Multiphysics Modeling and Simulation for a MEMS Thermal-Mechanical Switch

Novel lithography technique using an ASML stepper/scanner for the manufacture of display devices in MEMS world

An implantable Drug Delivery Device based on MEMS

MEMS Sensors for Harsh Environment Applications

A Silicon Ultrasonic Imager Probe for Minimally Invasive Diagnosis

New Analysis Method for Coupled-Field Micro Devices

Frequency Domain Modeling of SAW Devices

Modeling and Dynamics of Coupled Dome-shaped Micromechanical Oscillators

Design and Characterization of new GaAs Micromechanical Thermal Converter developed for Microwave Power Sensor

Development of Materials and Sensors for the U.S. Army’s Active Coatings Technology Program

A Novel Topology Optimization Scheme for Micro Electro-Thermo-Mechanical Domains

MEMS Humidity Structure with Cantilever – Simulation of Behaviour

Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS) for Acoustic Detection

A study on the novel micromixer with chaotic flow

Global MEMS Equipment and Materials Markets and Opportunities

Micromechanical GaAs Thermal Convertor for Gas Sensors

Mechanical Properties of Polycrystalline 3C-SiC Heteroepitaxial Layers

In-plane Vibration Measurements of Micro Scale Devices Using Sub-Pixel Image Registration Algorithms and Stroboscopic Illumination

Analysis of an Ink Ejection Failure on a MEMS Micro-Injector Printing Head