Index of Keywords

MEMS

Pressure Sensor Elements Integrated with CMOS

MEMS/NEMS Dynamics Measurement Tool Using The Stroboscopic Principle

Thermo-Mechanical Characterization and Integrity Checking of Packages and Movable-Structures

A Realistic Dream – a Top-Down Feasibility Study for MEMS Planetary Exploration

A MEMS Vertical Fringe Comb Capacitive Pressure Sensor for Biomedical Application

Application of Mass Transport in Solid Electrolyte Films in Tunable Microelectromechanical Resonators

MEMS Reliability Assessment ProgramMicro-electromechanical Systems (MEMS) Reliability Assessment Program for Department of Defense Activities

The Optimisation of a Resonant Gas Sensor by Using Nano-Tectured Surfaces

Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an “Atom Chip”

MEMS-Based MHz Integrated Ultrasonic Nozzles with Applications to Micro/Nano Technologies

The Design and Simulation of a Novel Out-of-plane Micro Electrostatic Actuator

Computer-Based Process Design Support for MEMS

Packaging Design with Thermal Analysis of LED on Silicon Substrate

Towards Nano Mechanical Sensors

mems

Y-nano X-micro Technologies: nanometric optical control

MEMS

Modeling of an Electroactive Polyimide Ultrasonic Wave Sensor for Aerospace Applications

Stress Optimization of a Micromechanical Torsional Spring

Optimization of GaAs MEMS structures for Microwave Power Sensor

MEMS Pressure Sensor with Two Thin Film Piezoelectric Read-Out

Electromechanical Modeling of MEMS Resonators with MOSFET Detection