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KeywordPaper title
MEMSMEMS Reliability Assessment Program – Progress t…
 Investigating the Benefit-Cost of MEMS Application…
 A Multi-Purpose Optical MEMS Sensor for Harsh Envi…
 Validation for Micro- and Nano-Sensors
 Silicon Carbide Micro/Nano Systems for Harsh Envir…
 Bridge Local Scour Monitoring System Using MEMS Se…
 Influence of the Casimir force on the static and d…
 Stability of micro and nano devices actuated by Ca…
 Numerical Capacitance Calculation for Mems Pressur…
 Multiphysics Modeling and Simulation for a MEMS Th…
 Novel lithography technique using an ASML stepper/…
 An implantable Drug Delivery Device based on MEMS
 MEMS Sensors for Harsh Environment Applications
 A Silicon Ultrasonic Imager Probe for Minimally In…
 New Analysis Method for Coupled-Field Micro Device…
 Frequency Domain Modeling of SAW Devices
 Modeling and Dynamics of Coupled Dome-shaped Micro…
 Design and Characterization of new GaAs Micromecha…
 Development of Materials and Sensors for the U.S. …
 A Novel Topology Optimization Scheme for Micro Ele…
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