Index of Keywords

MEMS

Systematic Design and Optimization of Multi-Material, Multi-Degree-of-Freedom Micro Actuators

Investigation of Cross-Coupling and Parasitic Effects in Microelectromechanical Devices on Device and System Level

Modelling of Processes of Photoacoustic Diagnostic with Piezoelectric Detection

Finite-Element Modeling of 3C-SiC Membranes

Modeling of Acoustic-Structural Coupling in a MEMS Hydrophone

Topics in Finite-Element Modeling of Piezoelectric MEMS Devices

Torsional Ratcheting Actuating System

Calculation of the AC Electroquasistatic Sinusoidal Steady-State Coulomb Force on a Conductor Coated with a Lossy Dielectric

The Atomic Limit of Finite Elements in the Simulation of Micro-Resonators

A Novel Approach for Determining Pull-In Voltages in Micro-electro-mechanical Systems (MEMS)

Nonlinear Analysis of Electrostatic Actuation in MEMS with Arbitrary Geometry

Mathematical Analysis of Electrostatically Actuated MEMS Devices

Reduced-Order Models of Stress-Stiffened MEMS Structures

The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices

Modeling and Design of a Micromechanical Phase-Shifting Gate Optical Modulator

GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS

Automatic Generation of Small-Signal Dynamic Macromodels from 3-D Simulation

Full Wave Electromagnetic Analysis and Model Order Reduction for Complex Three Dimensional Structures

Scalable Macromodels for Microelectromechanical Systems

New Numerical Techniques and Tools in SUGAR for 3D MEMS Simulation