Index of Keywords

MEMS

Network-Type Modeling of Micromachined Sensor Systems

A Fast Integral Equation Technique for Analysis of Microflow Sensors Based on Drag Force Calculations

Coupling of Length Scales and Atomistic Simulation of a MEMS Device

A Mixed Rigid/Elastic Formulation for an Efficient Analysis of Electromechanical Systems

Nodal Analysis for MEMS Design Using SUGAR v0.5

Systematic Design of Electrothermomechanical Microactuators using Topology Optimization

SEGS: On-line WWW Etch Simulator

An Environment for MEMS Design and Verification

Thermal Simulation Tools for Microsystem Elements

Computational Modeling of Microfluid Devices with Free Surface Liquid Handling

Micromachined Accelerometer Design, Modeling and Validation

Dynamic Effects of Linkage Joints in Electrostatic Microengines

Design and Modelling of Optical Microsystems - An Approach to a User-Friendly System Integration Technique

The Art of Modeling Coupled-Field Effects in Microdevices and Microsystems

Mask-Layout Synthesis Through an Evolutionary Algorithm

Surface Reconstruction of Etched Contours

Modeling of Electrostatic MEMS Components

A Common Basis for Mixed-Technology Micro-System Modeling

MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis

Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS