Index of Keywords


Integrated Modeling of Optical MEMS Subsystems

Concept of an Intelligent Microsystem Structure for Communication with Real Surrounding Space

Microsystem Modeling - from Macromodels to Microsystem Design

Modelling and Simulation of Mechanical, Thermal and Electrical Behaviour of Si Cantilever with Implanted Strain Gauge

System Level Analysis for a Locomotive Inspection Robot with Integrated Microsystems

Realizing Complex Microsystems: A Deterministic Parallel Assembly Approach

Adhesive and Conductive – Inkjettable Nano-filled Inks for use in Microelectronics and Microsystems Technology

Wireless Integrated MicroSystems (WIMS): Coming Revolution in the Gathering of Information

Nano-structure or nano-system: opportunities and pitfalls

Global MEMS Equipment and Materials Markets and Opportunities

MEMS and NEMS research for education

Micro to Nano – Scaling Packaging Technologies for Future Microsystems

Microsystems on their Way to Smart Systems

Control of MEMS-Technology Axial Topology MicroServos

Gas Sensor with SAW Structures

Nanotechnology-Enabled Microthrusters:Nanoenergetic Materials and MEMS Paradigm


Modeling and Validation of Flow-Structure Interactions in Passive Micro Valves


Frequency Tuning of Silicon Micromechanical Cantilevers by Laser Ablation


Nanotechnology-Enabled Microthrusters:Nanoenergetic Materials and MEMS Paradigm


A Novel X-ray Microtomography System with High Resolution and Throughput