Index of Keywords

micromachined gyroscopes

Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections

A Design Approach for Robustness Improvement of Rate Gyroscopes

MEMS Gyroscopes with Structurally Decoupled 2-DOF Drive and Sense Mode Oscillators

micromachined inertial sensors

Simulation of Micromachined Inertial Sensors with Higher-Order Single Loop Sigma-Delta Modulators

micromachined sensor

Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching


SEGS: On-line WWW Etch Simulator


System Level Simulation of a Digital Accelerometer

Computational Two-Dimensional Finite-Element Analysis of Flow Behavior Inside Microfluidic Amplifiers

Parameter Extraction for Surface Micromachining Using Eelectrical Characterization of Sensors

NanoMuscle at the Nano-Frontier

Design and Modeling of a 3D Micromachined Accelerometer

Improvement of dynamic features of an adaptive optical system for detection and correction of ophthalmic distortions

Control of Micro-Fluidic Flow using 3D Features

Effective Use of Focused Ion Beam (FIB) in Investigating Fundamental Mechanical Properties of Metals at the Nano-Scale.

micromachining SOI

Smart Pressure Sensor on SOI optimized by Finite Element Analysis for Heatspreader Integration


Wavelet Based Matrix Compression in Numerical Micromagnetics


Micromanipulation and Robotic Technology

A Micromanipulation Method based on the Capillary Force by Phase Transition

Evaluation of Manipulation Probes for Expanding the Range of Capillary Force

Microfluidic System for Assessing the Controllability of MC-1 Magnetotactic Bacteria as Carriers in Micro-channels