Index of Keywords

MEMS simulation

Simulation of Grating Light Valves

Resonant-Type Micro-Probe for Vertical Profiler

MEMs simulation

System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models

System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models

MEMS simulation

Design and Verification of an Electrostatic MEMS Simulator

MEMS spectrometer

Arrayed, Piezoelectrically-Actuated Mirrors and Gratings for Spectrometer

MEMS switch

High-fidelity MEMS Switch Model

Nanocomposite Contact Material for MEMS Switches

MEMS switches

Compact Modeling of Bistable Electrostatic Actuators

A new compact scalable circuit model for RF MEMS switches

MEMS test

Inductive Fault Analysis of a Microresonator

MEMS test structures

Fabrication and analysis of MEMS test structures for residual stress measurement

MEMS testing

Fault Model Generation for MEMS

MEMS tunable capacitor

Design of MEMS Tunable Capacitor all Metal Microstructure for RF Wireless Applications

MEMS ultrasound transducer

Frequency-Interleaved MEMS Ultrasound Transducer

MEMS valve

Analysis of Pressure Balanced MEMS Valves

Finite Element Analysis of MEMS Diaphragm Valves

MEMS-based products

Leveraging Mainstream Design and Analysis Tools for MEMS

MEMS-CAD

CAD for Opto-Electronic Microsystems

Optical Propagation Methodologies for Optical MEM Systems