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KeywordPaper title
MEMSAutomatically Generated and Experimentally Validat…
 Preparation of nickel doped multi-functional micro…
 Application of YAG Laser Micro-Welding in MEMS Pac…
 In-situ MEMS Testing
 Advanced In- and Out-off plane High Resolution X-r…
 Monolithic CMOS MEMS technology development: A pie…
 Mechanical Robustness of FPA in a-Si Microbolomete…
 Development of Surface-micromachined Binary Logic …
 Carbon-based Nanoelectronic Devices for Space Appl…
 A visual approach on MEMS process modeling using d…
 Design and Fabrication of a Low Power Electro-ther…
 Passive Temperature-Compensation of MEM Resonators
 Finite Element Modeling and Analysis of CMOS-SAW S…
 Comparaison between PDMS and PMMA for MEMS applica…
 Multi-purpose tool for checking the microfabricati…
 Design and Fabrication of a Metallic MEMS Gripper …
 Control of MEMS-Technology Axial Topology MicroSer…
 Programmable MEMS-Based Silicon Timing Solutions C…
 Design and Fabrication of a Multi-Axis MEMS Force …
 Weak Magnetic Fields Sensing Using Soft Ferrite Na…
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