Index of Keywords

MEMS

MEMS Reliability Assessment Program – Progress to Date

Advantages and Limitations of Diamond-Like Carbon as a MEMS Thin Film Material

Fabrication & Integration of nanobolometer sensors on a MEMs process

Assessment of the Impacts of Packaging, Long-Term Storage, and Transportation on the Military MEMS

Mechanical characterization of electrostatic MEMS switches

Measurement of nanometric deformation of thin membranes under controlled mechanical loads

MEMS and NEMS research for education

Stimuli-Responsive Polymers in bioMEMS Devices

Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering

Nano-gap high quality factor thin film SOI MEM resonators

MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer on an Airplane Fuselage

Building Micro-Robots: A path to sub-mm3 autonomous systems

Development of Active Systems for Military Utilization

Fabrication and Characterization of Thermo-pneumatic Peristaltic Micropumps

Development of A 4X4 Hybrid Optical Switch

Evidence of the Existence of Complete Phononic Band Gaps in Phononic Crystal Plates

Non traditional dicing of MEMS devices

A novel high-sensitivity resonant viscometer realised through the exploitation of nonlinear dynamic behaviour

Micromachined Force Sensors for Characterization of Chemical Mechanical Polishing

Numerical Modeling of Microdrop Motion on Digital Microfluidic Multiplexer