Index of Keywords

FEA

Mechanical properties of PECVD Si3N4 thin films with rapid thermal annealing using finite element simulation

Lumped Electro-Thermo-Mechanical Beam Model

feasibility

A Realistic Dream – a Top-Down Feasibility Study for MEMS Planetary Exploration

Capturing and Using CO2 as Feedstock for Clean Chemical Processes Technologies

Feature Modeling

Function-Oriented Geometric Design Approach To Surface Micromachined MEMS

feature scale

MEMS Fabrication Modeling with ChISELS: A Massively Parallel 3-D Level-Set Based Feature Scale Modeler

Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes

feature-based modeling

Voxel-Based Heterogeneous Geometric Modeling for Surface Micromachined MEMS

feature-scale

Nanoworld Semiconductor Industry - State and Future Challenges of Technology Computer Aided Design

Nanoworld Semiconductor Industry - State and Future Challenges of Technology Computer Aided Design

features on grains

Designing nanomaterials mechanical properties from the observable nanostructure features

FEBID

Polarisation stabilisation of telecom lasers by minimally-invasive direct-write focused electron beam induced deposition

FEBIP

Chip Scale Focussed Electron Beam Induced Etching of a Silicon Nitride Membrane with Unique Beam Writing Strategies

fed-batch emulsion copolymerization

Control of the morphology of nanoparticles resulting from the dynamic optimization of a fed-batch emulsion copolymerization process

feedback control

A Controller Design for SEPIC in a Fuel Cell Battery

feedblock

Interfacial Instabilities in Multilayer Extrusion

FEM

Residual Stresses/Strains Analysis of MEMS

Coupling of FEM Programs for Simulation of Complex Systems

FELLINI-A CAD Tool for the Design of Microsystems

An Environment for MEMS Design and Verification