| 8:00 | Registration |
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| 8:15 |
Welcome and introductory remarks
Salons II & III
Session chair: Andreas Wild, Motorola
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| 8:30 |
Keynote lectures
Salons II & III
Session chair: Bernard Courtois, TIMA Laboratory, France
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| 8:30 |
Fast Algorithms For 3-D Simulation Jacob White
Massachusetts Institute of Technology,, USA |
| 9:15 |
Living in an Expanding TCAD Space Len Borucki
Motorola, USA |
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| 10:00 |
Coffee
Condado Foyer
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| 10:20 |
Computational Materials
Salon II
Session chair: Andreas Wild, Motorola
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| 10:40 |
Template Recognition of Organosiloxane Stereoregular Macrocycles. Computational and Experimental Modeling of Sol-Gel Systems Formation T.V. Timofeeva, R.D. Clark, O.I. Shchegolikhina and N.L. Allinger
New Mexico Highlands University, USA |
| 11:00 |
New Materials Design. Free-Base Porphyrin and Its Meso-Tetrahalogenated Derivatives K.A. Nguyen and R. Pachter
Air Force Research Laboratory, USA |
| 11:20 |
Multiscale Modeling of Polycrystalline Diamond O.A. Shenderova, D.W. Brenner, A. Omeltchenko, X. Su, L.H. Yang, and A. Nazarov
North Carolina State University, USA |
| 11:40 |
Mesoscopic Breathing Sphere Model for Computer Simulation of Laser Ablation and Damage L. Zhigilei and B. Garrison
Penn State University, USA |
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| 10:20 |
Special Session: System-Level Modeling and Simulations of MEMS
Salon III
Session chair: Gary Fedder, Carnegie Mellon University
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| 10:20 |
Modeling of Electrostatic MEMS Components G. Lorenz, R. Neul and S. Dickmann
Robert Bosch GmbH, GERMANY |
| 10:40 |
A Common Basis for Mixed-Technology Micro-System Modeling J.P. Hanna and R.G. Hillman
Air Force Research Laboratory, USA |
| 11:00 |
MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis E. Sacks and J. Allen
Purdue University, USA |
| 11:20 |
Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS A. Dewey, H. Dussault, J. Hanna, E. Christen, G. Fedder, B.F. Romanowicz, and M.A. Maher
Duke University, USA |
| 11:40 |
MEMS Component Extraction B. Baidya, S.K. Gupta and T. Mukherjee
Carnegie Mellon University, USA |
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| 12:00 |
Lunch
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| 13:20 |
Back-End: Metallization-1
Salon II
Session chair: Andrew Kuprat, Los Alamos National Laboratory
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| 13:20 |
Numerical Simulations of Sputter Deposition and Etching in Trenches Using the Level Set Technique P.L. O'Sullivan, F.H. Baumann and G.H. Gilmer
Lucent Technologies, USA |
| 13:40 |
TopoSim3D/Grain3D: Modeling Surface Deposition and Growth J. T. Gammel and R. Walker
Los Alamos National Laboratory, USA |
| 14:00 |
Modeling Facet Growth of Cu Thin Films Z. Wang, Y. Li and J.B. Adams
Arizona State University, USA |
| 14:20 |
Computational Modeling with a New Latttice-Based Continuum Formulation for the Coupled Thermodynamic and Mechanical Equilibrium of Polycrystalline Solids L. Bassman, K. Garikipati and M. Deal
Stanford University, USA |
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| 13:20 |
Special Session: Computational Methods for Microfluidics
Salon III
Session chair: Narayan Aluru, University of Illinois
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| 13:20 |
Efficiency and Accuracy Improvements for FastStokes, A Precorrected-FFT Accelerated 3-D Stokes Solver W. Ye, J. Kanapka, X. Wang and J. White
MIT, USA |
| 14:00 |
Scaling Issues for Calculations of Low-Velocity Gaseous Microflows C.R. Kaplan and E.S. Oran
Naval Research Laboratory, USA |
| 14:20 |
Dynamics in Microfluidic Systems with Microheaters S. aus der Wiesche, C. Rembe, C. Maier and E.P. Hofer
University of Ulm, GERMANY |
| 15:40 |
Lubrication Analysis and Boundary Integral Simulations of a Viscous Micropump R.F. Day and H.A. Stone
Harvard University, USA |
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| 13:20 |
Characterization, Parameter Extraction, Calibration
Salon I
Session chair: Peter Cousseau, Swiss Federal Institute of Technology
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| 13:20 |
Modelling, Calibration and Validation of Contributions to Stress in the STI Process Sequence K. Garikipati, V.S. Rao, M. Yin, E. Ibok, H. I. De Wolf and R.W. Dutton
Stanford University, USA |
| 13:40 |
Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET and Non-Parametric Fitting S.B. Crary, P. Cousseau, D. Armstrong, D.M. Woodcock, O. Dubochet, P. Lerch and P. Renaud
University of Michigan, USA |
| 14:00 |
Parameter Extraction for a Microwave Micromachined Switch J. Chen, K. Coperich, S-M Kang, and J.Schutt-Aine
University of Illinois, USA |
| 14:20 |
Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling E.K. Chan, K Garikipati, R.W. Dutton
Stanford University, USA |
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| 14:40 |
Coffee
Condado Foyer
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| 15:00 |
Back-End: Metallization-2
Salon II
Session chair: Denise George, Los Alamos National Laboratory
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| 15:20 |
3D Modeling of Metallic Grain Growth D. George, N. Carlson, J. Tinka Gammel, and A. Kuprat
Los Alamos National Laboratory, USA |
| 15:00 |
Monte Carlo Modeling of Thin Film Deposition: Influence of Grain Boundaries on the Porosity of Barrier Layer Films J. Dalla Torre, G.H. Gilmer, D.L. Windt, F.H. Baumann, H.H. Huang, T. Diaz de la Rubia, and M. Djafari Rouhani
Lucent Technologies, USA |
| 15:40 |
Modelling Nucleation and Growth of Voids During Electomigration D. Richards, J.B. Adams, L. Borucki, R. Stumpf and C-L. Liu
Arizona State University, USA |
| 16:00 |
Molecular Dynamics Study of Thermally Induced Shear Strain in Nanoscale Copper P. Heino and E. Ristolainen
Tampere University of Technology, FINLAND |
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| 15:00 |
Special Session: Computational Methods for Microfluidics
Salon III
Session chair: Narayan Aluru, University of Illinois
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| 15:00 |
A Fast 3D Solver for Unsteady Stokes Flow with Applications to Micro-Electro-Mechanical Systems W. Ye, J. Kanapka, and J. White
MIT, USA |
| 15:20 |
Simulation of Electroosmosis Using a Meshless Finite Point Method M.J. Mitchell and N.R. Aluru
University of Illinois, USA |
| 15:40 |
A Passive Fluid Valve Element for a High-Density Chemical Synthesis Machine R. M. Moroney, R. Amantea and S.E. McBride
Sarnoff Corp., USA |
| 16:00 |
Stability Criterion for Microscale Concentric Flow of Two Immiscible Liquids L.W. Ho, J. Marchetti and C. Gallegos
IntelliSense Corp., USA |
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| 15:00 |
Semiconductor Device Modeling
Salon I
Session chair: Andreas Wild, Motorola
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| 15:00 |
Modelling an NMR Probe for Magnetometry G. Boero, D. Schlaefli, P.A. Besse and R.S. Popovic
EPFL, SWITZERLAND |
| 15:20 |
A New Analytical Energy Relaxation Time Model for Device Simulation V. Palankovski, B. Gonzalez, H. Kosina, A. Hernandez and S. Selberherr
TU Vienna, AUSTRIA |
| 15:40 |
Impact of Heat Source Localization on Conduction Cooling of Silicon-on-Insulator Devices P. Sverdrup, Y.S. Ju, and K.E. Goodson
Stanford University, USA |
| 16:00 |
Offset Analysis in CMOS Magnetotransistors by Numerical Simulation M. Metz and H. Baltes
ETH Hoenggerberg, SWITZERLAND |
| 16:20 |
Simulation of the Frequency Limits of SiGe HBTs J. Gessner, F. Schwierz, H. Mau, D. Nuernbergk, M. Rossberg, and D. Schipanski
Technische Universitat Ilmenau, GERMANY |