
	1998 NSTI Nanotechnology Conference & Trade Show

Nanotech 98 Technical Program - Tuesday April 7

Applications: Optics, Electromagnetics 1

Salon 5

Session chair: Armin Sulzmann, EPFL

13:20	Opto-Electro-Mechanical model for MOEMS G. Jacquemod, K. Vuorinen, F. Gaffiot, A. Spisser, C. Seassal, J.L. Leclercq, P. Viktorovitch and J.P. Laine Ecole Centrale de Lyon
13:45	Simulation of Grating Light Valves E. Furlani Eastman Kodak Co.
14:10	Towards an Integrated Environment for Modeling and Simulating an Electro-Optic Measurement Microsystem A. Barwicz, M. Ben Slima, M.P. Wisniewski Universite du Quebec a Trois-Rivieres
14:35	Modeling Semiconductor Optical Devices G. Sartoris ETH-EPFL

Poster Session A

Salon 6, Time 15:00 - 16:30

Software Systems and Tools P11

Design Optimization of Microsystems
H. Eggert, W. Suss, H. Guth, S. Meinzer, W. Jakob and I. Sieber
Institut fur Angewandte Informatik

Systematic Design of MEMS Using Topology Optimization
O. Sigmund
Technical University of Denmark

SEGS: On-line Etch Simulator
G. Li, T.J. Hubbard and E.K. Antonsson
Daltech-Dalhousie University

Computer Aided Modeling of Static and Dynamic Transfer Characteristics
M. Anton, S. Bechtold and R. Laur
University of Bremen

Simulation of Electrostatically Loaded MEMS Using a Program Manager with an Integrated Optimization Tool
O. Nagler, M. Trost, F. Kozlowski and B. Hillerich
Fraunhofer Institute for Solid State Technology

Layout Verification Tools for MEMS Physical Design
R. Bruck, K. Hahn and B. Reusch
Universitat Dortmund

Simulating 3-dimensional deep x-ray lithography using the CXrL Toolset
G. Aigeldinger, B. Craft and W. Menz
Louisiana State University

Characterization, Parameter Extraction, Calibration P12

Experimental Investigation of GaAs On-Wafer TRL Calibration Using 90 Degree Bender Standards
M. Jenner
Aalborg University

Analysis of Noise in pH ISFET's Based on an Analytical Model for Drift
S. Jamasb
Cirrus Logic, Inc. and UC-Davis

Rational RSM Models for Device Characteristics as Functions of Process Parameters
Y. Granik and V. Moroz
PDF Solutions, Inc.

Methodology for Calibrating Process and Device Simulators by Extracting Process Parameters from Electrical Data
H-M Ho, Y. Zu, K.V. Loiko and D.H.Y. Lim
Chartered Semiconductor Manufacturing Ltd.

Validation and Calibration of Electrothermal Device Models Using IR Laser Probing Techniques
R. Thalhammer, C. Furbock, N. Seliger, E. Gornik and G. Wachutka
Technical University of Munich

Analysis and Characterization of Laterally Induced Electrostatic Repulsive Forces
K.B. Lee and Y-H Cho
Korea Advanced Institute of Science and Technology

Inductance Extraction by Means of Monte Carlo Method
G. Leonhardt, C. Hager, P. Regli, W. Fichtner
ETH-EPFL

Discretization, Numerics, Computational Efficiency P13

Numerical Methods for Digital Signals Analysis and Optimal Design
A.H. Arakelyan and M.R. Voskanyan
Ministry of Health o f the Republic of Armenia

Coupling of FEM programs for Simulation of Complex Systems
B. Krevet and W. Kaboth
Forschungszentrum Karlsruhe

Coupled Electro-Mechanical Simulation of Integrated Micro-Electro-Mechanical Systems
H-P Lien, T.G. Wiegele, L. Bomholt and R. Ruhl
Integrated Systems Engineering AG

MEMS Design Optimization Using Coupled FEM and Electrical Circuit Simulation
H. Krassow, M. Zabala, A. Gotz and C. Cane
Centro Nacional de Microelectronica

A 3D Mesh Generation Method for the Simulation of Semiconductor Processes and Devices
K. Lilja
Technology Modeling Associates, Inc.

Dispersive Media in FDTD--Comparison of Recursive Convolution and Auxiliary Differential Equation Methods
T.O. Korner and W. Fichtner
ETH-EPFL

Parallel PVL Algorithm for Large Linear Circuit Analysis
T. Yang
Linkoping University

Equivalent Circuits, Behavioral and Multilevel Simulation P14

Spice-like Simulation Using Real Devices Instead of their Mathematical Models
V.V. Denisenko
Research Laboratory of Design Automation

Fast Behavioral Simulation of Phase-Locked Loop Tuned Master-Slave Filters
L.J. Opalski and M.A. Styblinski
Texas A&M University

Electrical Analogue of Capacitive Force-Balanced Accelerometer Used in HSPICE Simulator
Z. Li, G. Wu and Y.Y. Wang
Peking University

Modeling Mixed Electromechanical Systems with PSPICE
K.O. Petrosjanc and A.P. Semetsov
Moscow University of Electronics and Mathematics

System Level Simulation of a Digital Accelerometer
M. Kraft and C.P. Lewis
Coventry University

Complete Transient Simulations of Electrostatic Actuators
C. Cojocaru, P. Lerch, B. Kloeck, C. Bourgeois and P. Renaud
EPFL

Accurate Lumped-Parameter modeling for Dynamic Simulation of Electrostatic MEMS Actuators
S. Pal Chaudhury and P. Franzon
North Carolina State University

Thermal Modeling P15

A Least Squares Algorithm for Optimal Heater Placement in Microsensors
C.C. Liu, P.F. Man and C.H. Mastrangelo
University of Michigan

Extraction of Dynamic HDL-A Models of Thermally Based Microsystems form Physical Simulations
S. Marco, M. Carmona and J. Samitier
Universitat de Barcelona

Application of Numerical Simulations to Problems in Nanotechnology
A.M. Moulin, S.J. O'Shea, M.A. Lantz, A.R. Downes, M.C. Hersam and M.E. Welland
Cambridge University

Electro-Thermo-Mechanical Simulations of Aluminum Bond Wires in IGBT-Packages
C. Hager, Y. Tronel and W. Fichtner
ETH-EPFL

Thermal Mapping of Systems and Components Using Infrared Radiometers
M. Mitchell
Inframetrics, Inc.

Thermal Behavior of a V-MCM Package Containing a Thermo-Pneumatic Micropump, Sensors and Integrated Electronics
J. Sieiro, A. Morrissey, M. Carmona, S. Marco, J. Smaitier, G. Kelly and J. Alderman
Universitat de Barcelona

Applications: Chemical Sensors P16

Modeling a Micromanufactured Open-Tipped Recessed Oxygen Microelectrode
J.C. McGuyer, M.J. Vasile and R.W. Schubert
Louisiana Tech University

Modeling and Simulation of Low Power Integrated Catalytic Gas Sensors
G. McRobbie, F. Clark, C. Tandy and J. Sheriff
University of Paisley

Optimization of Biosensor Microreactors Design by Computer Simulation
A.L. Kukla and Y.M. Shirshov
Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine

Electro-Thermal Modeling: Design Tool for the Conception of a Low Power SNO2 Gas Sensor
S. Astie, A.M. Gue, E. Scheid, J.P. Guillemet
LAAS-CNRS

From Layout to System Simulation: An Example of an Oxygen Sensor
H. Camon, A.M. Gue, M. Dilhan, C. Alonso and B. Jammes
LAAS-CNRS

Thermal Simulation Tools for Microsystem Elements
V. Szekely, M. Renez, A. Pahi, A. Poppe and S. Hajder
Technical University of Budapest

Applications: Pressure, Actuation, Navigation P17

An Integrated Pressure Sensor with High Performance
B.N. Lee, H.D. Park and K.N. Kim
Korea Electronics Technology Institute

Sensor Error Modeling of a Micromechanical Flexure Accelerometer
M. Guellali
University of Braunschweig

Optimal Three Dimensional Analysis and Design of an Electrostatic Comb Drives Using Boundary Element Methods
W. Ye and S. Mukherjee
Cornell University

Design and Simulation of a Double Comb Structure
J.S. Bergstrom, F.E.H. Tay, J. Logeeswaran and Y.H. Loh
National University of Singapore

Simulation of Silicon Piezoresistive Sensors
Y. Kanda and K. Matsuda
Toyo University

Modeling and Finite Element Analysis of MEMS Diaphragm Valves
F. Yang and I. Kao
SUNY-Stony Brook

Robust Design of Silicon Piezoresistive Pressure Sensors
T-K Shing
Industrial Technology Research Institute

Microsteping Control of Hybrid Stepped Motor Using Fuzzy Logic for Robotics Application
A.Z. Mohamed, A.M. Zaki
Electronics Research Inst.

Break

16:30

Poster Session B

Salon 6, Time 16:30 - 18:00

Software Systems and Tools P21

Autonomous Agents Design for Digital Network Maximization in Joint C4I System
L. Luqi, M. Dabose and J. Ying
Naval Postgraduate School

An Environment for MEMS Design and Verification
S.F. Bart, N.R. Swart, M. Mariappan, M. H. Zaman and J.R. Gilbert
Microcosm Technologies, Inc.

Using Java/CORBA in a Distributed Modeling and Simulation Environment
T. Strelich and G. Thompson
Illgen Simulation Technologies, Inc.

Multi-Mode Sensitive Layout Synthesis of Microresonators
S. Iyer, T. Mukherjee and G.K. Fedder
Carnegie Mellon University

DOPDEES/PMM: A System for Portable Model Description
A.H. Gencer and S.T. Dunham
Boston University

ACE + MEMS: An Integrated Multidisciplinary CAD System for Micro-Electro-Mechanical Systems (MEMS)
A.J. Przekwas and A. Krishnan
CFD Research Corp.

Control and Simulation in LabVIEW's G an Integrated Environment for Dynamic Systems
D. Chen, R. Luo and L. Wenzel
National Instruments

A Composite Integrated Mixed-Technology Design Environment to Support Micro Electro Mechanical Systems Development
J. Karam, B. Courtois, H. Boutamine, A. Cao, J. Rodriguez, V. Szekely, M. Rendcz, K. Hoffman and M. Glesner
TIMA

Model Building for Microsystems
H.J. Lee, H. von Sosen and M.A. Maher
Tanner Research, Inc.

FELLINI-A CAD Tool for the Design of Microsystems
M. Lang and M. Glesner
Darmstadt University of Technology

Modeling P22

Fault Model Generation for MEMS
A. Kolpekwar, C Kellen and R.D. Blanton
Carnegie Mellon University

A Floating Random-Walk Method for Efficient RC-Extractino of Complex IC-Interconnect Structures
R.B. Iverson and Y.L. LeCoz
Random Logic Corp.

Fishbone Architecture: Analogy Theory of Cochlear Mechanisms for Sensors and Actuators
S. Ando
University of Tokyo

Non-Parametric Modeling of Process-Induced Variability
S. Rao, S. Saxena, P. Apte, P.K. Mozumder, J. Davis, R. Burch and K. Vasanth
Texas Instruments, Inc.

Drain and Gate Voltage Influences on MAGFET Offset and Sensitivity: Modeling and Experiment
A.M. Ionescu, N. Mathieu and A. Chovet
LPCS/ENSERG

Modeling of Smart Integrated Sensors of Rotating Parameters for Automotive Applications
N. V. Kirianaki, N. O. Shpak, S. Y. Yurish
Institute of Computer Technologies

Reliability Issues in Micro-Electro-Mechanical
X.R.J. Avula
University of Missouri-Rolla

Bulk and Topography Processing P23

Modeling Image Formation in Layered Structures: Application to X-ray Lithography
B.S. Bollepalli, M. Khan and F. Cerrina
UW-Madison

Numerical Simulation for the Sacrificial Release of MEMS Square Diaphragms
W.J. Li, J.C. Shih, C-M Ho, L. Liu and Y-C Tai
UC-Los Angeles

Three-Dimensional Simulation of Bulge Formation in Contact Hole Metalization
W. Pyka and S. Selberherr
Technical University Vienna

Applications: Microfluidics P24

Modeling and Simulation of a Microdispenser Dynamics for Droplets Generation
R. Keoschkerjan, L. Dressler and N. Schwesinger
Technical University of Ilmenau

Modeling and Design Optimization of a Novel Micropump Considering Four Different Coupled Physical Domains
A. Klein, S. Matsumoto and G. Gerlach
Dresden University of Technology

Optimization of a Piezo Paddle Mikro Pump
I. Ederer
Technical University of Munich

Numerical Simulation Approach to Estimation of Laser Opto-Microengine Characteristics
M. Ota, T. Nakao and M. Sakamoto
Tokyo Metropolitan University

Modeling Strategies for Microsystems
P. Voigt, G. Schrag, E-R Sieber and G. Wachutka
Technical University of Munich

Modeling 3-D Fluid Flow for a MEMS Laminar Proportional Amplifier
M.M. Athavale, H.Y. Li , A.J. Przekwas, B.H. Piekarski, R.J. Zeto and S.M. Tenney
CFD Research Corp.

Modeling and Validation of Flow-Structure Interactions in Passive Micro Valves
R.E. Oosterbroek, S. Schlautmann, J.W. Berenschot, T.S.J. Lammerink, A. van den Berg and M.C. Elwenspoek
University of TWente

Analysis of Flow and Stress Due to Differential Pressure for MEMS Diaphragm Valves
F. Yang and I. Kao
SUNY-Stony Brook

Applications: Optics, Electromagnetics P25

General Design Strategy for Optical Microsystems
C. Waechter, P. Schreiber, W. Karthe, J-P Elbers, C. Glingener, E. Voges, D. Krabe, R. Dumcke, H. Reichl, G. Hagner, S. Schroter, H. Bartelt, E.A. Stock, G. Bauer, W. Schafer, H. Sickinger and J. Schwider
Fraunhofer-Institut fur Angewandte Optik und Feinmechanik

Simulation of Dynamic Responses and Stress Distribution of a Miniature Fabry-Perot Interferometer
K.K. Liu, S.P. Lee, R.J. Lin, H.H. Chen and C.A. Hung
Industrial Technology Research Institute

Microwave Short-Range Interferometric Radar
A. Benlarbi-Delai, J.P. Covillers and Y. Leroy
IEMN-UMR-CNRS

Applications: Hall Effect, Storage P26

2D Nonlinearity Simulation of the Vertical Hall Sensor Using SESES
C. Schott, Z. Randjelovic, J-M Waser and R.S. Popovic
EPFL

Sensitivity Calculation Model Using the Finite-Difference Method
C. Mueller, G. Scheinert and H. Uhlmann
Technical University of Ilmenau

Semianalytic Modeling of a Magnetic Levitated Disk with Nonuniform Polarization
S. Michael, G. Scheinert and H. Uhlmann
Technical University of Ilmenau

Analytical Study of Vertical Hall-Devices Using an Adapted Conform Mapping Technique
P.A. Besse, C. Schott and R.S. Popovic
EPFL

High Performance Magnetic Field Smart Sensor Arrays with Source Separation
A. Paraschiv-Ionescu, C. Jutten, A.M. Ionescu, A. Chovet and A. Rusu
LIS

Applications: Semiconductors P27

Modeling and Characterization of an Ultrafast Planar Rectifier
Z. Hossain
Motorola, Inc.

Cellular Automata Studies of Vertical MOSFETs
M. Saraniti, G. Zandler, G. Formicone and S. Goodnick
Arizona State University

Simulation of Narrow-Width Effects in Sub-Half-Micron n-MOSFETs with LOCOS Isolation
K.V. Loiko, I.V. Peidous, H.M. Ho and D.H. Lim
Chartered Semiconductor Manufacturing Ltd.

Breakdown in the Output Characteristics of Deep Submicron, a-Si:H TFTs
L. Colalongo, M. Valdinoci, G. Forunato, L. Mariucci and M. Rudan
University of Bologna