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Nano Science and Technology Institute 1998 NSTI Nanotechnology Conference & Trade Show
Nanotech 98
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Nanotech 98 Technical Program - Monday April 6

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8:00 Registration

Conference Opening

Salons 4-5

8:15 Andreas Wild
Motorola, Semiconductor Products Sector

Keynote Lectures

Salons 4-5

Session chair: Andreas Wild, Motorola

8:30 An Approach to Macro-Modeling of MEMS Devices
Prof. Stephen D. Senturia
Massachusetts Institute of Technology
9:15 Challenges in Process Modeling for MEMS
Prof. Robert W. Dutton
Stanford University

Break

10:00 - 10:20

Bulk and Topography Processing 1

Salon 5

Session chair: Franco Cerrina, University of Wisconsin-Madison

10:20Molecular Dynamics (MD) Simulations of Reactive Ion Etching (RIE) of Si by Cl, Cl2, Br and Br2 Ions
S.M. Valone, D.E. Hanson, J.D. Kress and A.F. Voter
Los Alamos National Laboratory
10:45Computer Aided Mask-Layout for Bulk Etch Fabrication
M. Long and J.W. Burdick
California Institute of Technology
11:10A Semi-Empirical Resist Dissolution Model for Sub-micron Lithographies
M. Khan and F. Cerrina
UW-Madison
11:35A Method of MOSFET Dopant Profile Prediction and its Use in Transistor Design
M. Kulkarni, K. Fasanath, J. Davis, S. Saxena and G. Pollack
Texas Instruments, Inc.

Characterization, Parameter Extraction, Calibration 1

Salon 4

Session chair: Narayan Aluru, University of Illinois at Urbana-Champaign

10:20Microelectromechanical Systems (MEMS) Design and Design Automation Research at Duke University
A. Dewey and R. Fair
Duke University
10:45Characterization of Electrostatically Actuated Beams Through Capacitance-Voltage Measurements and Simulations
E.K. Chan, Z.K. Hsiau, K. Gaikipati and R.W. Dutton
Stanford University
11:10Numerical Mesh Effects on Model Calibration in Technology Simulation
I. Kouznetsov, K. Vasanth, J. Davis, V. Axelrad, S. Saxena, R. Burch, S. Rao and P.K. Mozumder
UC-Berkeley
11:351/f Noise Characterization of a Surface-Micromachined Suspended Gate FET
H. Fu, M.L. Kniffin, G. Watanabe, M.P. Masquelier and J. Whitfield
Motorola, Inc.

Lunch

12:00 - 13:20

Applications: Microfluidics 1

Salon 5

Session chairs: Philippe Renaud, EPFL, and Xavier Avula, University of Missouri-Rolla

13:20A Surface Recombination Velocity Model for Liquid Flow in Microchannels
J.N. Zemel
University of Pennsylvania and Scitefair International Inc
13:45Squeeze Film Damping Effect on the Dynamic Response of a MEMS Torsion Mirror
Pan, Kubby, Peeters, Tran and Mukherjee
XEROX, *Cornell
14:10Computational Fluid Dynamics Modeling of Micromachined Flexural Plat Wave Pumps
A. Lal and R.M. White
UC-Berkeley
14:35Comprehensive Simulation of an Ion Mobility Spectrometer
B.M. Cramer and D.A. Mlynski
Universitat Karlsruhe

Modeling 1

Salon 4

Session chair: Henry Baltes, ETH Zurich

13:20A Universal Low-Field Electron Mobility Model for Semiconductor Device Simulation
G. Kaiblinger-Grujin, H. Kosina and S. Selberherr
Vienna Technical University
13:45Modeling of Threshold Voltage and Surface potential of NMOS Transistor with Localized Defects in Oxide
A. Bouhdada, R. Marrakh and A. Touhami
Universite Hassan II
14:10A Physical I-V Model of Deep-Submicron FD SOI MOSFETs for Analogue/Digital Circuit Simulation
H. Wang, X. Xi, X. Zhang and Y. Wang
Peking University
14:35PSDesigner: A Framework for Transistor Co-Optimization
R. Burch, S. Saxena, P.K. Mozumder, K. Vasanth, J. Davis and S. Rao
Texas Instruments, Inc.

Break

15:00 - 15:30

Applications: Pressure, Actuation, Navigation

Salon 5

Session chair: Chris Menzel, Ford Microelectronics Inc.

15:30Hierarchical Representation and Simulation of Micromachined Inertial Sensors
J.E. Vandemeer, M.S. Kranz and G.K. Fedder
Carnegie Mellon University
15:55Electromechanical Simulation of an Integrated Micromachined Accelerometer for the Prediction of System-Level Performance
M.L. Kniffin, T.G. Wiegele, M.P. Masquelier, H. Fu, J. Whitfield
Motorola, Inc.
16:20Micromachined Accelerometer Design, Modeling and Simulation
B.R. Davies, V.I. Bateman, F.A. Brown, S. Montague, J.R. Murray, D. Rey and J.H. Smith
Sandia National Laboratories
16:45On the Vibrations of a MEMS Gyroscope
W.O. Davis, O.M. O'Reilly and A.P. Pisano
UC-Berkeley
17:10Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm
J.H. Correia, M. Bartek and R.F. Wolffenbuttel
Delft University of Technology
17:35Dynamic Effects of Linkage Joints in Electro-Static Micro-Engines
J.J. Allen, S.L. Miller, G.F. LaVigne and M.S. Rodgers
Sandia National Laboratories

Discretization, Numerics, Computational Efficiency 1

Salon 4

Session chair: Selden B. Crary, University of Michigan, Danish Technical University, Lyngby, Denmark

15:30A Fast Integral Equation Technique for Analysis of Microflow Sensors Based on Drag Force Calculations
N.R. Aluru and J. White
MIT
15:55The Adaptive Weighted Polynomial Preconditioner for the Semiconductor Equations
T. Yang
Linkoping University
16:20Unstructured 3D Grid Toolbox for Modeling and Simulation
M.P. Masquelier, D. George and A. Kuprat
Motorola
16:45Coupling of Length Scales and Atomistic Simulation of a MEMS Device
R.E. Rudd and J.Q. Broughton
SFA, Inc.
17:10Automated 3D Topography Generation for MEMS Visualization
D.L. DeVoe, S.B. Green and J.M Jump
University of Maryland
17:35Energy Based Resolution Method for the Global Comportment of Diaphragms Under Pneumatic and Electrostatic Pressure
O. Francais and I. Dufour
LISiR-URA-CNRS
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