NSTI Nanotech 2009

2009 International Conference on

Nanofabrication Technologies, Devices and Applications

NanoFab 2009

Nano Fabrication

May 3 - 7, 2009
George R. Brown Convention Center
Houston, Texas, U.S.A

An Interdisciplinary Integrative Forum on
manufacturability in nanofabrication processes and technologies
for current and novel devices and applications.



Conference Chairs

Jason Haaheim Jason Haaheim
Manager, DPN Applications
NanoInk, Inc.
Guy DeRose Guy A. DeRose
Associate Director of Technical Operations
Kavli Nanoscience Institute
California Institute of Technology
Aaron Stein Aaron Stein
Brookhaven National Laboratory

Confirmed Invited Speakers

Francesco Stellacci Francesco Stellacci
Professor, Massachusetts Institute of Technology (MIT)
Advances in Biological Sensing and Manipulation by DPN and SERRS, Duncan Graham
Professor, University of Strathclyde, Glasgow, Scotland
Ricardo Ruiz Directing Block Copolymer Patterns within Bit Patterned Media Specifications
Ricardo Ruiz
Hitachi Global Storage
	Axel Scherer Integration of Lithographically Printed Optical, Fluidic and Electronic Systems, Axel Scherer, Neches professor, Caltech,, Director, Kavli Nanoscience Institute
John Hunt John Hunt
Professor, Department of Clinical Engineering
University of Liverpool

Symposium Sessions


Monday May 4

8:00 Keynotes: Nanotech & Cleantech & TechConnect
10:30 NanoFab: Carbon Nano Structures: CNT Deposition & Assembly
10:30 NanoFab: Fundamentals - self assembly, synthesis, and patterning
1:30 NanoFab: SPL METHODS - Bottom up assembly
4:00 NanoFab: Tools and Instrumentation Showcase - 1

Tuesday May 5

8:00 Keynotes: Nanotech & Cleantech & TechConnect
10:30 NanoFab: Alternative Top-down Fabrication Modes
1:30 NanoFab: Integration & Nanodevices
 NanoFab: Novel Materials, Structures & Processes

Wednesday May 6

8:00 Keynotes: Nanotech & Cleantech & TechConnect
8:30 Keynote Panel: The Future of Energy
10:30 NanoFab: DPN Applications
 NanoFab: Novel Materials, Structures & Processes
3:30 NanoFab: Tools and Instrumentation Showcase - 2

Thursday May 7


Symposium Program


Monday May 4

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8:00 Keynotes: Nanotech & Cleantech & TechConnectTheater AB
 Session chair: Matthew Laudon, NSTI and Patti Glaza, CTSI
8:00 The Nanotech Revolution in Renewable Energy
D. Arvizu - Director, National Renewable Energy Laboratory (NREL), U.S. Department of Energy, US (bio)
8:30 Nanotechnology and the Obama Administration
T. Kalil, Office of Science and Technology Policy, The White House, US
9:00 Innovation for a Secure Future
R. Johnson - CTO, Lockheed Martin, US (bio)
9:30 The Next Big Thing is Really Small
R.J. Kumpf - CAO, Bayer Material Science, US (bio)
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10:30 NanoFab: Carbon Nano Structures: CNT Deposition & AssemblyRoom 370 CF
 Session chair: Aaron Stein, Brookhaven National Lab, US
10:30 Dissymetric metal deposition on carbon nanotubes
C. Warakulwit, M.-H. Delville, V. Ravaine, J. Limtrakul, A. Kuhn, University of Bordeaux, FR
10:50 Overview of Solid Phase Synthesized Carbon Nano Tube; Revealing of the Regional Affects
K.C. Nguyen, K.C. Nguyen, D.V. Nguyen, T.N.M. Anh, N.N. Thy, T.H. Phat, T.L. Hieu, Saigon Hi Tech Park, VN
11:10 Self Aligned Multi-Layer Nano-Gap Electrodes for Fluidic and Magnetic Assembly of Carbon Nanotubes
J.S. Shim, Y-H Yun, M.J. Schulz, C.H. Ahn, University of Cincinnati, US
11:30 Tunable Thermal Conductivity of CNT Assembly
A.E. Aliev, University of Texas at Dallas, US
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10:30 NanoFab: Fundamentals - self assembly, synthesis, and patterningRoom 370 BE
 Session chair: Guy DeRose, Caltech, US
10:30 Thermodynamics and patterning of surfactant mixtures on curved surfaces
F. Stellacci, Massachusetts Institute of Technology, US
11:00 Catalyst-Free, High-Speed Synthesis of ZnO Nanostructures
J. Pedersen, K.S. Teh, San Francisco State University, US
11:20 Synthesis and characterization of nanoporous alumina films with controlled physical and chemical attributes
N.A. Monfared, S. Atre, R. Kishton, S. Varadarajan, Oregon State University, US
11:40 Controlled Attachment of Gold Nanoparticles on Ordered Titania Nanotube Arrays
M. AbdElmoula, E. Panaitescu, L. Menon, Northeastern University, US
12:00 Structural and Optical Properties of Zinc Oxide Nanoparticles Synthesized using Continuous Spray Pyrolysis Reactor
V. Dutta, V. Phanikaran B., C. Dwivedi, Indian Institute of Technology Delhi, IN
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1:30 NanoFab: SPL METHODS - Bottom up assemblyRoom 370 BE
 Session chair: Jason Haaheim, NanoInk, US
1:30 Advances in Biological Sensing and Manipulation by DPN and SERRS
D. Graham, University of Strathclyde, UK
2:00 Temperature Controlled Dip-Pen Nanolithography
R.G. Sanedrin, N.A. Amro, J. Rendlen, M. Nelson, NanoInk, US
2:20 High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
D. Wang, R. Szoszkiewicz, T. Okada, S.C. Jones, V. Kodali, W.D. Underwood, J.E. Jarvholm, M. Rumi, W.P. King, J.E. Curtis, S.R. Marder, E. Riedo, Georgia Institute of Technology, US
2:40 Using Nanolithography: From Synthesis of Materials to Metrology Platforms
N. Singh, V. Sathyamurthi, A. Patil, R. Gargate, D. Banerjee, Texas A&M University, US
3:00 Plasma-Directed Organized Nanodot Formation on Polymeric Surfaces
D. Kontziampasis, N. Vourdas, G. Boulousis, V. Constantoudis, A. Tserepi, E. Gogolides, N.C.S.R. “Demokritos”, GR
3:20 Direct nanotransfer printing of metal electrodes with sub-15-nm gaps
S. Harrer, S. Strobel, G. Scarpa, G. Abstreiter, M. Tornow, P. Lugli, Technische Universitaet Muenchen, DE
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4:00 NanoFab: Tools and Instrumentation Showcase - 1Room 370 BE
 Session chair: Aaron Stein, Brookhaven National Lab, US
4:00 Making Hands-on Nanoscale Science and Engineering Education a Broader Reality with the NanoInk NanoProfessor
J.R. Ireland, NanoInk, Inc., US
4:20 Raman microanalysis for nano-materials: Bringing Raman spectroscopy to the SEM and AFM microscope and the new SERS imaging techniques
R. Bormett, Renishaw, US
4:40 Focused Ion Beam machining of large and complex nanopatterns
O. Wilhelmi, L. Roussel, P. Anzalone, D.J. Stokes, P. Faber, S. Reyntjens, FEI Company, NL
5:00 Cost Saving Strategies: Using a project planning process that can integrate capital and operational spending into a Nanofabrication Business Plan
A. Gregg, M. Strnad, Abbie Gregg, Inc., US
5:20 Nanofabrication using Step and Flash Imprint Lithography
D. Resnick, Molecular Imprints, US
5:40 The application of E-beam lithography to fabrication of photonic crystals
T. Osada, JEOL, US

Tuesday May 5

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8:00 Keynotes: Nanotech & Cleantech & TechConnectTheater AB
 Session chair: Jeff Moseley, Greater Houston Partnership, Shushana Castle, Clinton Global Initiative Member/Millennium Water Alliance, US
8:00 Welcome TechConnect World to Houston
J. Moseley, Greater Houston Partnership, US
8:15 Can Uncle Sam Cure What Ails Clean Tech?
P. Dickerson, HaynesBoone, former COO Office of Energy Efficiency & Renewable Energy, DOE, US (bio)
8:45 Welcome to Houston
B. White, City of Houston, Mayor, US
9:00 Flying into the Future: Continental’s Commitment to the Environment
L. Kellner, Continental Airlines, CEO, US (bio)
9:30 RUSNANO: Driving the Nanotech Industry Growth
A. Chubais, RUSNANO, CEO, RU
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10:30 NanoFab: Alternative Top-down Fabrication ModesRoom 370 BE
 Session chair: Leo Ocola, Argonne National Lab, US
10:30 Directing Block Copolymer Patterns within Bit Patterned Media Specifications
R. Ruiz, Hitachi Global Storage, US
11:00 Hierarchical nano-structuring by combining ion induced self-organization and lithographic pre-patterning
F. Frost, B. Ziberi, T. Lutz, M. Cornejo, R. Fechner, D. Hirsch, K. Zimmer, Leibniz-Institute of Surface Modification, DE
11:20 The first Italian micro exposure tool for EUV lithography: design guidelines and experimental results
F. Flora, S. Bollanti, P. Di Lazzaro, L. Mezi, D. Murra, A. Torre, ENEA, IT
11:40 Stretegies for fabrication of nanostructures using focused ion beam technology
V.J. Gadgil, MESA+ institute for nanotechnology, NL
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1:30 NanoFab: Integration & NanodevicesRoom 370 BE
 Session chair: Guy DeRose, Caltech, US
1:30 Integration of Lithographically Printed Optical, Fluidic and Electronic Systems
A. Scherer, Caltech, US (bio)
2:00 Fabrication of Guided-mode Resonance Devices by Soft Lithography in Hybrimers
K.J. Lee, R. Magnusson, J.H. Jin, B.-S. Bae, University of Texas at Arlington, US
2:20 High-Yield Fabrication and Characterizations of Sub-50 nm Nanomechanical Resonators
C. Guthy, R. Das, S. Evoy, University of Alberta, CA
2:40 Scalable manufacturing of room-temperature single electron transistors via “amphibious”
L.C. Brousseau, Quantum Logic Devices, US
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4:00 POSTERSExpo Hall
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NanoFab: Novel Materials, Structures & ProcessesExpo Hall
- Horizontally oriented long carbon nanotubes grown on Si substrates by using a catalytic Chemical Vapor Deposition process
E. Dervishi, Z. Li, Y. Xu, F. Watanabe, V. Saini, A.R. Biris, A.S. Biris, University of Arkansas at Little Rock, US
- Electrochemical Charging of Carbon Nanotubes for Tunable Electron Field Emission Cathodes
A. Kuznetsov, A. Zakhidov, N. Barisci, A. Zakhidov, The University of Texas at Dallas, US
- Optical properties of Zinc Oxide/Polymer Nanocomposite
S.C. Singh, R.K. Swarnkar, R. Gopal, University of Allahabad, IN
- A Precise Reclaim Fabrication by Nanoscale Removal Processes using a Design of Ellipsoidal Anode
P.S. Pa, National Taipei University of Education, TW
- Pulsed Laser Deposition of CaxBa1-xNb2O6 Thin Film on Nano-patterned Silicon Substrate
I. Stateikina, S. Delprat, M. Chaker, Institut National de la Recherche Scientifique, CA
- The Use of Microreactors for Manufacturing of High Performance Nanomaterials
B.K. Paul, C-H Chang, Oregon State University, US
- A Revolutionary Approach the Production and Dispersion of a Vast Array of Metal Oxide and Mixed-Metal Oxide Nanoparticles
B.F. Woodfield, J. Boerio-Goates, L. Astle, Brigham Young University, US
- In situ synthesis of metal nanoparticles embedded multifunctional PDMS films
A. Goyal, A. Kumar, P.K. Patra, S. Mahendra, P.J.J. Alvarez, P.M. Ajayan, Rice University, US
- Self-organized nanostructures on semiconductor surfaces by low-energy ion beam erosion
M. Cornejo, B. Ziberi, J. Völlner, F. Frost, B. Rauschenbach, Leibniz-Institute of Surface Modification, DE
- Growth and Microstructure of Si Core/Ge Shell Nanowires
J-S Park, L. Cao, M.L. Brongersma, W-K Seong, B.M. Clemens, Stanford University, US
- A low temperature fabrication of AlO2 films with supercritical CO2 fluid treatment for OTFT application
P.T. Liu, Y.T. Chou, C.S. Huang, L.F. Teng, Y.L. Huang, National Chiao-Tung University, TW
- Fabrication of High-Aspect-Ratio Nanochannels using Novel Nanoscale Silicon Mold and Solvent Assisted Sealing
Y.H. Cho, J. Par, H. Park, X. Cheng, B.J. Kim, A. Han, Texas A&M University, US
- Curved Polymer Nanochannel Fabrication using PMMA Layer Transfer and Collapse
Y.H. Cho, H. Park, H.S. Kim, X. Cheng, A. Han, Texas A&M University, US
- Nanometric AlN Thin Films Growth by Non Reactive RF Sputtering
C. Chesman, J.A.S. Moura, I. Guedes, Universidade Federal Do Rio Grande Do Norte, BR
- Batch Fabrication at Room Temperature of Arrays of Freestanding Nanoneedles
S. Arva, M.M. Yazdanpanah, R.W. Cohn, University of Louisville, US
- Systematic Study of Nanoscale Resolution for Low-Energy Electron Beam Lithography
M.A. Mohammad, Zs. Szabó, T. Fito, J.M. Lee, J. Chen, M. Aktary, S.K. Dew, M. Stepanova, National Institute for Nanotechnology, CA

Wednesday May 6

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8:00 Keynotes: Nanotech & Cleantech & TechConnectTheater AB
 Session chair: Patti Glaza, CTSI, US
8:00 Energy in the 21st Century: Muir, Patton, and Gandhi
R. James Woolsey, VantagePoint Venture Partners, US (bio)
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8:30 Keynote Panel: The Future of EnergyTheater AB
 Session chair: Patti Glaza, CTSI, US
- D. Beneby, Exelon, President, Exelon Power, US
- M. Kapner, Austin Energy, US
- C. Frasier, Shell, VP Americas, US (bio)
- M. Simmons, Simmons & Company, US
- J. Renaud, GE Ecomagination, US
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10:30 NanoFab: DPN ApplicationsRoom 370 BE
 Session chair: Jason Haaheim, NanoInk, US
10:30 Dip Pen Nanolithography® Provides for the Critical Definition of the Environment to Control Human Adult Stem Cell Populations
J. Hunt, University of Liverpool, UK
11:00 Deconstructing Receptor Signaling with Chemically Nanopatterned Interfaces
K. Salaita, UC - Berkeley, US
11:20 Biological Applications of Lipid-Based Dip-Pen Nanolithography
S. Lenhert, Forschungszentrum Karlsruhe GmbH, Institut für NanoTechnologie, Germany, DE
11:40 Manipulating Nanostructures with Chemically Patterned Surface
Y. Wang, University of Maryland, US
12:00 Single-Protein Control on Nanoarrays generated by Dip-Pen Nanolithography
D. Maspoch, Institut Catala de Nanotecnologia, Spain, ES
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1:30 POSTERSExpo Hall
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NanoFab: Novel Materials, Structures & ProcessesExpo Hall
- Electrical Characteristics of Mesoporous Pure Silica Zeolite for 32 nm CMOS Interlayer Dielecric Films
T. Kikkawa, Hiroshima University, JP
- p-Type Single-Wall Garbon Nanotube Network on n-Type Si for Heterojunction Photovoltaic Cells
Z. Li, Y. Xu, V. Saini, E. Dervishi, M. Mahmood, A.R. Biris, A.S. Biris, University of Arkansas at Little Rock, US
- Nano-scaled water ejection using Nanopipette with QTF-AFM for Nanolithography
S.M. An, S.J. Jang, H.E. Noh, W.H. Jhe, Seoul National University, KR
- Single-step synthesis of visible-light TiO(2-X)N(X) photocatalyst nanopowder by thermal plasma
C-Y Tsai, H-C Hsi, National Kaohsiung First University of Science & Technology, TW
- Analysis of density variation for different temperatures in thermal nano imprinting process
D-E Lee, H-J Lee, S-W Choi, W-I Lee, Seoul National University, KR
- Fabrication of nanogap-based field effect transistor using nanoimprint lithography
J. Lee, M.-C. An, K.-D. Kim, J.-H. Jeong, J.-H. Ahn, Y.K. Choi, Korea Institute of Machinery and Materials, US
- Spark Plasma Synthesis (SPS) Device for Sintering of Nanomaterials
N. Jalabadze, L. Nadaraia, A. Mikeladze, R. Chedia, T. Kukava, L. Khundadze, Technical University of Georgia, GE
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3:30 NanoFab: Tools and Instrumentation Showcase - 2Room 370 BE
 Session chair: Jason Haaheim, NanoInk, US
3:30 Industrial applications of spherical polymer particles and hollow silica shells
D.E. Lynch, Exilica Limited, UK
3:50 Microfluidizer High Shear Processing
T. Panagiotou, K.J. Chomistek, Microfluidics Corporation, US
4:10 Silane-Free, Solid Pre-cursor For SiC deposition
M. Davies, Sixtron Advanced Materials Inc, CA
4:30 Screenless Agitator Bead Mill for the Use of Smallest Grinding Media
S. Mende, J. Hill, NETZSCH Fine Particle Technology LLC, US
4:50 New Applications for CMP: Solving the Technical and Business Challenges
R.L. Rhoades, Entrepix, Inc., US

Announcement and Call for Participation

About NanoFab

The largest gathering in the field worldwide, NanoFab is the premier technical forum for presenting the latest research and development in nanofabrication technologies, devices and applications.


Nanotechnology promises an unprecedented era of innovation across multiple disciplines and diverse applications. Its pursuits and activities are proliferating with different approaches, from top-down to bottom-up to converging techniques, and with varying degree of maturity from concept to commercialization. The key to realize nanotechnology's potential is still the ability to assemble and manufacture nano-scale devices, structures with dimensions smaller than 100nm. This conference will focus on all areas of nanofabrication that will accelerate nanotechnology's progress: innovative research to state-of-the-art development to cost-effective manufacturability in nanofabrication processes and technologies for current and novel devices and applications, including enabling and differentiating aspects in materials, metrology, characterization, and reliability.

Topics & Application Areas

  • Novel Materials, Nano-Structures, and Nanoscale Processes
  • Carbon Nano Structure Devices and Nano-Wires: Fabrication and Applications
  • Advances in Direct-Write Nanoscale Deposition and Patterning
  • Advances in Bottom-Up Approaches to Nano-Composites and Nano-Particles
  • Non-Conventional Nano-Patterning: Top Down/Bottom Up Convergence
  • Harnessing Nanofabrication for Pharmaceutical Applications: biosensors, drug delivery, screening
  • Symbiotic technologies in Nanofabrication and Inspection: patterning, deposition, microscopy, and spectroscopy
  • Other

All papers on nano-applications in photonic, microelectronic, telecommunication, chemical, biotech, medical, pharmaceutical, homeland security, environmental, agricultural, consumer, and transportation are relevant. The primary focus is on innovative fabrication that significantly advances current application and enables novel nano-application.

Nanofabrication papers that have significant overlap with other Nanotechnology Conferences at NSTI Nanotech may be presented in joint sessions to enhance the synergism of the Nanotechnology Conferences.


Journal Submissions

Journal of Experimental Nanoscience

Journal of Experimental Nanoscience

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of the Journal of Experimental Nanoscience. The journal provides a showcase for advances in the experimental sciences underlying nanotechnology and nanomaterials.

For consideration into this Special Issue of the Journal of Experimental Nanoscience, please select the “Submit to Journal of Experimental Nanoscience” button during the on-line submission procedure. You may only select a single journal during the submission process.

Conference Organization

Conference Chairs

Jason Haaheim, NanoInk, Ink.
Guy A. DeRose, California Institute of Technology
Aaron Stein, Brookhaven National Laboratory

Program Committee

Adekunle Adeyeye, National University of Singapore, Singapore
Ronald S. Besser, Stevens Institute of Technology, USA
Gregory R. Bogart, Symphony Acoustics, USA
Chorng-Ping Chang, Applied Materials, Inc., USA
Charles Kin P. Cheung, NIST, USA
Zheng Cui, Principal Scientist, Group Leader,Micro and Nanotechnology Centre, Rutherford Appleton Laboratory, UK
Seth B. Darling, Argonne National Laboratory, USA
Guy A. DeRose, California Institute of Technology, USA
Zhixiong Guo, Rutgers University, USA
Takamaro Kikkawa, Hiroshima University and National Institute of Advanced Industrial Science and Technology, Japan
Jungsang Kim, Duke University, USA
Uma Krishnamoorthy, Sandia National Laboratory, USA
Andres H. La Rosa, Portland State University, USA
Warren Y.C. Lai, Renaissance Wireless/Resonance Semiconductor, USA
Sergey D. Lopatin, Applied Materials, Inc., USA
Pawitter Mangat, Motorola, USA
Omkaram Nalamasu, Applied Materials, Inc., USA
Vivian Ng, National University of Singapore, Singapore
Leonidas E. Ocola, Argonne National Laboratory
Sang Hyun Oh, University of Minnesota, USA
Stanley Pau, University of Arizona
John A. Rogers, University of Illinois at Urbana-Champaign, USA
Nicolaas F. de Rooij, Université de Neuchâtel, Switzerland
Aaron Stein, Brookhaven National Laboratory, USA
Vijay R. Tirumala, Cabot Corporation, USA
Gary Wiederrecht, Argonne National Laboratory, USA

Conference Operations Manager

Sarah Wenning, Nano Science and Technology Institute, USA
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