Self Aligned Multi-Layer Nano-Gap Electrodes for Fluidic and Magnetic Assembly of Carbon Nanotubes
J.S. Shim, Y-H Yun, M.J. Schulz, C.H. Ahn
University of Cincinnati, US
Keywords: carbon nanotube, nano gap, nano fabrication, self assembly
Abstract:A self aligned nano-scale gap was fabricated using conventional optical lithography, and applied for the assembly of a carbon nanotube (CNT). The new technique enables the formation of a sub-micron gap between self-aligned electrodes with resolution as low as 500 nm, which is challenging dimension for aligning two layers. An individual CNT was then assembled on the fabricated gap by the previously reported technique of fluidic assembly using magnetic attraction on a residual catalyst. This work may enable the mass-production of devices containing nano-assembled components for high performance electronics and biosensors.