Kinetic Monte Carlo Study on Carbon Trapping Effect with Pre-amorphized Silicon
S. Park, B. Cho, T. Won
Inha University, KR
Keywords: carbon co-implant, pre-amorphization, binary collision approximation, kinetic monte carlo
Abstract:We report our kinetic Monte Carlo (kMC) study of the effect of carbon co-implant on the pre-amorphization implant (PAI) process. We employed BCA (Binary Collision Approximation) approach for the acquisition of the initial as-implant dopant profile and kMC method for the simulation of diffusion process during the annealing process. The simulation results implied that carbon co-implant suppresses the boron diffusion due to the recombination with interstitials. Also, we could compare the boron diffusion with carbon diffusion by calculating carbon reaction with interstitial. And we can find that boron diffusion is affected from the carbon co-implant energy by enhancing the trapping of interstitial between boron and interstitial.