Photonic Crystal (PC) Waveguide based Micro-Pressure Sensors
The University of Western Ontario/C4, CA
Keywords: micro-sensor, micro-electro-mechanical systems, pressure sensor, photonic crystal, silicon-on-insulator, optical waveguides, atomic force microscopy
Abstract:The innovation in the technology is that it uniquely employs optical waveguide technology coupled with a micromechanical sensing unit that can detect pressure, force or acceleration with high sensitivity. It is developed on the SOI (Silicon-On-Insulator) MEMS platform allowing for compatibility with commercial manufacturing in the future.