NSTI Nanotech 2009

PRODUCTION OF MULTILAYER MICROCOMPONENTS BY THE SACRIFICIAL THICK LAYER METHOD

J. Chartier
Université de Bordeaux, FR

Keywords: sacrificial layer, thick-film, thermal microactuator, microresistor, microchannels, piezoelectric devices, strain gauge, low-cost

Abstract:

The invention relates to production of microcomponents comprising layers, each consisting in a material chosen from metals, ceramics… Two specific inks are deposited on a substrate in a predetermined pattern. The achieved microcomponent is obtained after complete consolidation of one ink layers and complete or partial removal of the other.
 
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