NSTI Nanotech 2009

An Industrial Partner for ALD on PV Applications

J. Skarp
BENEQ, FI

Keywords: ALD, large scale manufacturing, equipment

Abstract:

ALD produces thin films at low processing temperature with excellent step coverage, without pin-holes and possibity to customize materials in nanoscale. ALD is an enabler in applications like conformal coatings on different types (e.g. Si, C, ZnO) of nanotubes or organic films. Beneq is an equipment manufacturer of ALD systems. With experience and process know-how of more than 20 years we offer not only tools for r&d but also for large area production. As an unique service we offer contract r&d and ALD deposition services.
 
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