Environmentally Sound Photoreactive Cleaning: A Product and Technology Overview
D.J. Elliott, V.M. Chaplick
UVTech Systems, US
photochemical, laser-gas absorption
A new simple system has been built and installed in semiconductor plants that uses laser light and oxygen to clean semiconductor and other surfaces without chemicals. This system has only four moving parts, has no waste-treatable by-products, and is small and simple to operate. This paper will present an overview of the use of the system in an industrial plant, show results and describe how it can replace current wet cleaning processes in many industries worldwide that casue significant pollution issues.
Nanotech 2008 Conference Program Abstract