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Environmental and Economic Assessment of Nano-Fabrication Processes of Memory Devices
L. Dahlben, J.A. Isaacs
Northeastern University, US
Keywords:
carbon nanotubes, non-volatile memory, semiconductor fabrication, environmental impact, industrial economics
Abstract:
The unique mechanical, electronic, and non-volatility of carbon nanotubes (CNT) have significant potential to replace current silicon-based switches. However, before fully integrating CNT switches into the semiconductor industry, the production costs and environmental impacts associated with these nanomanufacturing processes must be comprehensively assessed. Life cycle analysis and process-based technical cost models are created to compare both these fabrication processes.
Nanotech 2008 Conference Program Abstract
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