2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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TechConnect Summit
Clean Technology 2008

Nanomaching of Silicon nanoporous Structures by Colloidal Gold Nanoparticle

J. Zhu, H. Bart-Smith, M.R. Begley, R.G. Kelly, G. Zangari, M.L. Reed
University of Virginia, US

Keywords:
nanomachining, gold nanoparticles, nanoporous

Abstract:
We report an efficient method for fabricating nanoporous structures in crystalline silicon, using colloidal gold nanoparticles in HF/H2O2 etchant. Colloidal gold in HF/H2O2 solutions accelerates the etching rate by two orders of magnitude and simultaneously introduces anisotropy in the etching process, with preferential penetration along the directions. Random nanoporous structure, tailored nanochannel and nanopore were developed with this method.


Nanotech 2008 Conference Program Abstract