Replication of micro/nano combined structure using micro/nano combined aluminum stamp
K.J. Cha, T.H. Kwon
micro/nano combined structure, pressing, anodic aluminum oxide, hot embossing
This paper presents an easy and efficient fabrication method of plastic replicas of micro/nano combined structures using an aluminum stamp with micro/nano combined structures (ASMNCS) on its surface. ASMNCS could be fabricated by two steps: i) the first step is to introduce micro patterns on an electro-polished aluminum plate by pressing it by micro structured stamp; ii) the second one is to form nano dimple array onto the micro structured aluminum plate making use of the anodic aluminum oxide (AAO) technique. Finally the micro/nano combined structure is replicated on the polymer film (PMMA) via hot embossing process using ASMNCS as a mold.
Nanotech 2008 Conference Program Abstract